2020年9月1日
Improvement of tin oxide single crystal on an m-plane sapphire substrate by mist chemical vapor deposition
Japanese Journal of Applied Physics
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- 巻
- 59
- 号
- 9
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.35848/1347-4065/abac3f
- 出版者・発行元
- IOP PUBLISHING LTD
© 2020 The Japan Society of Applied Physics. We successfully improved quality of tin oxide (SnO2) films formed on m-plane sapphire substrates by mist chemical vapor deposition. The crystal quality was characterized mainly by the FWHM of the X-ray diffraction ω-rocking curve. We found that the use of tin acetate [Sn(CH3COO)4] solution led to the formation of high-quality SnO2 film, where FWHM was as narrow as 0.1°. Using tin chloride (SnCl4) solution, electrical and optical properties can be improved because crystal grain size was large. Therefore, on the SnO2 layer formed with the Sn(CH3COO)4 solution, the second SnO2 layer was overgrown with the SnCl4 solution to form a double-layer structure, where FWHM was also 0.1° and carbon impurity was lower than that of the first SnO2 layer. Furthermore, in case of the second SnO2 layer, we found that a growth temperature window providing the narrow FWHM of 0.1° was very wide (500 °C-800 °C).
- リンク情報
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- DOI
- https://doi.org/10.35848/1347-4065/abac3f
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000563285700001&DestApp=WOS_CPL
- Scopus
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85091643728&origin=inward
- Scopus Citedby
- https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85091643728&origin=inward
- ID情報
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- DOI : 10.35848/1347-4065/abac3f
- ISSN : 0021-4922
- eISSN : 1347-4065
- SCOPUS ID : 85091643728
- Web of Science ID : WOS:000563285700001