Papers

Peer-reviewed
2007

Monolithic pixel detector in a 0.15μm SOI technology

IEEE Nuclear Science Symposium Conference Record
  • Y. Arai
  • M. Hazumi
  • Y. Ikegami
  • T. Kohriki
  • O. Tajima
  • S. Terada
  • T. Tsuboyama
  • Y. Unno
  • H. Ushiroda
  • H. Ikeda
  • K. Hara
  • H. Ishino
  • T. Kawasaki
  • E. Martin
  • G. Varner
  • H. Tajima
  • M. Ohno
  • K. Fukuda
  • H. Komatsubara
  • J. Ida
  • H. Hayashi
  • Display all

Volume
3
Number
First page
1440
Last page
1444
Language
English
Publishing type
Research paper (international conference proceedings)
DOI
10.1109/NSSMIC.2006.354171

We describe a new pixel detector development project using a 0.15 μm fully-depleted CMOS SOI (Silicon-On-Insulator) technology. Additional processing steps for creating substrate implants and contacts to form sensor and electrode connections were developed for this SOI process. A diode Test Element Group and several test chips have been fabricated and evaluated. The pixel detectors are successfully operated and first images are taken and sensibility to β-rays is confirmed. Back gate effects on the top circuits are observed and discussed. © 2006 IEEE.

Link information
DOI
https://doi.org/10.1109/NSSMIC.2006.354171
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000288875601105&DestApp=WOS_CPL
ID information
  • DOI : 10.1109/NSSMIC.2006.354171
  • ISSN : 1095-7863
  • SCOPUS ID : 38649111700
  • Web of Science ID : WOS:000288875601105

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