2007
Monolithic pixel detector in a 0.15μm SOI technology
IEEE Nuclear Science Symposium Conference Record
- Volume
- 3
- Number
- First page
- 1440
- Last page
- 1444
- Language
- English
- Publishing type
- Research paper (international conference proceedings)
- DOI
- 10.1109/NSSMIC.2006.354171
We describe a new pixel detector development project using a 0.15 μm fully-depleted CMOS SOI (Silicon-On-Insulator) technology. Additional processing steps for creating substrate implants and contacts to form sensor and electrode connections were developed for this SOI process. A diode Test Element Group and several test chips have been fabricated and evaluated. The pixel detectors are successfully operated and first images are taken and sensibility to β-rays is confirmed. Back gate effects on the top circuits are observed and discussed. © 2006 IEEE.
- Link information
- ID information
-
- DOI : 10.1109/NSSMIC.2006.354171
- ISSN : 1095-7863
- SCOPUS ID : 38649111700
- Web of Science ID : WOS:000288875601105