Susumu Tamura
(田村 進)
Modified on: 2024/12/18
Profile Information
Research Areas
1Research History
1Education
2Misc.
86-
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 43(11 B) 7871-7875, Nov, 2004
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(11B) 7871-7875, Nov, 2004
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JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 43(11B) 7871-7875, Nov, 2004
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Jpn. J. Appl. Phys., 43(11B) 7871-7875, 2004
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極薄シリコン酸化膜の形成・評価・信頼性第９回研究報告, pp.139-143, 2004
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Jpn. J. Appl. Phys., Vol.43 pp.7871-7875, 2004
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Titanium oxy-nitride films deposited on stainless steel by an ion beam assisted deposition techniqueJournal of Materials Sience, Vol.38 pp2011-2018, 2003
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Titanium oxy-nitride films deposited on stainless steel by an ion beam assisted deposition techniqueJournal of Materials Sience, Vol.38 pp2011-2018, 2003
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第113号 pp.12-13, 2002
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Surface and Coatings Technology, Vol.158 pp690-693, 2002
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Surface and Coating Technology, Vol.158 pp568-572, 2002
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Surface and Coatings Technology, Vol.158 pp690-693, 2002
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Surface and Coating Technology, Vol.158 pp568-572, 2002
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技苑, 第111号 pp.15-17, Mar 29, 2001
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材料, 第50巻 pp.901-903, 2001
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Surface Review and Letters, Vol.8 No.3&4 pp.245-249, 2001
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Surface Review and Letters, Vol.8 No.3&4 pp.245-249, 2001
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技苑, 第102号, Jan 31, 2000
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Nuclear Instruments and Methods in Physics Research B, Vol.166/167 pp.87-91, 2000
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Nuclear Instruments and Methods in Physics Research B, Vol.166-167 pp.82-86, 2000
Presentations
17-
2007 Int. Meeting for Future of Electron Devices, Kansai, 2007
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電子情報通信学会, 2007
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2007 Int. Meeting for Future of Electron Devices, Kansai, 2007
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14th Workshop on Dielectrics in Microelectronics, 2006
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14th Workshop on Dielectrics in Microelectronics, 2006
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第５２回応用物理学関係連合講演会, 2005
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第５２回応用物理学関係連合講演会, 2005
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23rd Electronic Materials Symposium（EMS-23）, 2004
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2004Int. Workshop on Dielectric Thin Films for Future ULSI Devices-Science and Technology（IWDTF-2004）, 2004
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第５１回応用物理関係連合講演会, 2004
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23rd Electronic Materials Symposium（EMS-23）, 2004
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2004Int. Workshop on Dielectric Thin Films for Future ULSI Devices-Science and Technology（IWDTF-2004）, 2004
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第６４回応用物理学会学術講演会, 2003
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第６４回応用物理学会学術講演会, 2003
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第６４回応用物理学会学術講演会, 2003
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第５０回応用物理関係連合講演会, 2003
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第４８回応用物理関係連合講演会, 2001