論文

査読有り
2002年7月

Development of electron source for Auger electron spectroscopy in scanning probe microscope systems

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS
  • Y Miyatake
  • ,
  • T Nagamura
  • ,
  • K Hattori
  • ,
  • Y Kanemitsu
  • ,
  • H Daimon

41
7B
開始ページ
4943
終了ページ
4947
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1143/JJAP.41.4943
出版者・発行元
INST PURE APPLIED PHYSICS

We have developed a scanning tunneling microscope (STM) combined with an Auger electron energy analyzer for both topography observation and element analysis on surfaces. A special STM tip was designed for a field-emission source that induces the Auger process. We found that a simple STM tip is not effective, since the trajectories of Auger electrons ejected from the surface are bent considerably by the high electric field between the surface and the tip. Instead, the shield electrode around the tip reduces the bending, and carbon Auger electrons (KLL) ejected from the highly oriented pyrolytic graphite were detected. In future, such an Auger-STM will enable both types of observation conveniently on the same region by changing modes between topography and Auger measurements.

リンク情報
DOI
https://doi.org/10.1143/JJAP.41.4943
CiNii Articles
http://ci.nii.ac.jp/naid/110006341644
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000177512300041&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/JJAP.41.4943
  • ISSN : 0021-4922
  • CiNii Articles ID : 110006341644
  • Web of Science ID : WOS:000177512300041

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