内田 憲男

Shape and Vibration Control of a beam with Smart Sensors and Actuators Used for a Space Antenna 

Proceedings of the Fourth China-Japan International Workshop on Internet Technology and Control Applications 77-83 2005年  

PVDFフィルムセンサを用いた一様断面構造物の振動変形モニタリング（共著）, (Monitoring of Structural Vibration by Using Distributed PVDF Film Sensors) 

日本機械学会論文集(Transaction of the Japan Society of Mechanical Engineers) 67(660-C), 2565-2571 2001年  

Vibration mode reconstruction of a thin plate by using shaped PVDF sensors(共著) 

11^th International Conference on adaptive structures and technologies(ICAST) 50-57 2000年  

Vibration distribution reconstruction and control of a thin plate by using distributed PVDF sensors affixed to the plate(共著) 

Proceedings of 7^th International Symposium on Smart Structures and Materials, SPIE 3984 576-586 2000年  

Damping of Micro Electrostatic Torsion Mirror Caused by Air-film Viscosity(共著) 

Proceedings of The 13^th Annual International Conference on Micro Electro Mechanical Systems(MEMS-2000), IEEE 449-454 2000年  

DVD as an Example of Optical Pattern Fabrication and Replication Techniques Applied to Information Equipment 

Advances in Information Storage System 10 135-148 1999年  

Electrostatic Torsion Mirror(共著) 

Technical Digest of The 16^th Sensor Symposium 167-170 1998年  

Mask Membrane Deflection Caused by Mask Tilt During the Wafer Stepping Motion in X-ray Steppers. 

Journal of Vacuum Science & Technology B 16(6) 3480-3484 1998年  

Laser Beam Recorder for the Fabrication of DVD Glass Master 

Journal of the Japan Society for Precision Engineering 64(3) 372-375 1998年  

Ultra-Precise Traveling Slider for Fabrication of DVD Glass Master(共著) 

Proceedings of American Society for Precision Engineering 32-34 1996年