The energy spectra of X-rays produced by an LiTaO3 single crystal have been measured at pressures of 5-50 Pa. The energy spectra showed that the amount of X-rays increased exponentially and the endpoint energy of the spectra increased linearly with the decrease of pressure at pressures of 10-25 Pa. A maximum endpoint energy of about 22 key was obtained using an LiTaO3 single crystal with 0.5 mm thickness at the pressure of 10 Pa. The maximum energy produced by the present experimental setup was estimated assuming that the LiTaO3 single crystal forms a parallel-plate capacitor. The estimated energy reasonably agreed with the energy obtained. The pressure dependence of the endpoint energy was discussed in relation to the breakdown potential at low pressures. (C) 2011 Elsevier B.V. All rights reserved.