Papers

Peer-reviewed
2009

Absolute sputtering yields from solid Ne by low energy He+ and Arq+ (1 <= q <= 6) impact

14TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF HIGHLY CHARGED IONS (HCI 2008)
  • Shinya Fujita
  • ,
  • Takayuki Tachibana
  • ,
  • Tetsuo Koizumi
  • ,
  • Takato Hirayama

Volume
163
Number
First page
012083
Last page
Language
English
Publishing type
Research paper (international conference proceedings)
DOI
10.1088/1742-6596/163/1/012083
Publisher
IOP PUBLISHING LTD

Absolute sputtering yields from the surface of solid Ne by low energy He+ and Arq+ (1 <= q <= 6) impact are measured. Very large sputtering yields (300 atoms/ion for 1 keV He+ impact, and 3000 atoms/ion for 1keV Ar+ impact) have been observed. A significant dependence of the sputtering yields on the chage state, i.e. the potential energy, of the incident ion for Arq+ has not been observed because it is estimated to be much smaller than that of the kinetic sputtering, which suggests that the mechanism of potential sputtering is similar to those known for the electron- and photon-stimulated desorption processes.

Link information
DOI
https://doi.org/10.1088/1742-6596/163/1/012083
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000273556200083&DestApp=WOS_CPL
ID information
  • DOI : 10.1088/1742-6596/163/1/012083
  • ISSN : 1742-6588
  • Web of Science ID : WOS:000273556200083

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