Absolute yields of the photo-induced desorption at the surface of solid rare gases are studied in the excitonic excitation region. Both metastable and total desorption yields depend strongly on excitation energy and film thickness of rare gas solids. The absolute desorption yields and their dependence on film thickness are quantitatively reproduced by a simulation based on the diffusion of excitons in the bulk and the kinetic energy release by a cavity ejection mechanism and an excimer dissociation mechanism followed by internal sputtering. © 2003 American Institute of Physics.