論文

査読有り 国際誌
2022年6月24日

Three-Degree-of-Freedom Electromagnetic Microactuator With Powder-Based Sm-Fe-N Magnets and Parylene Beams

Journal of Microelectromechanical Systems
  • Huayu Wang
  • ,
  • Shunsuke Yamada
  • ,
  • Masashi Matsuura
  • ,
  • Satoshi Sugimoto
  • ,
  • Shuji Tanaka

31
4
開始ページ
634
終了ページ
643
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1109/jmems.2022.3183611
出版者・発行元
Institute of Electrical and Electronics Engineers (IEEE)

In this paper, we report a moving magnet type electromagnetic actuator with three-degree-of-freedom, namely the displacement in XY axes and rotation around Z axis, by utilizing rare earth magnetic powder Sm-Fe-N. Parylene was utilized to fabricate springs to suspend four drive units and a center moving stage located in the four corners and the center of the actuator, respectively. The rare earth magnetic powder Sm-Fe-N with wax were embedded in the silicon frames of the drive units with a parylene layer, followed by magnetization by an 8 T pulse magnetic field to obtain permanent micromagnets. The motion of the center moving stage can be controlled by the drive units. To obtain an in-plane displacement in the XY axes, compensation coils were fabricated in a print circuit board (PCB) to eliminate the Lorentz force in the Z axis. The application of a direct current (DC) allowed the center moving stage to move in the XY axes by 55 μm and rotate almost 3 degrees around the Z axis, respectively. The resonance frequencies of the motion in the XY axes and the rotation around the Z axis were 630 Hz and 675 Hz, respectively.

リンク情報
DOI
https://doi.org/10.1109/jmems.2022.3183611
URL
http://xplorestaging.ieee.org/ielx7/84/9847109/09805835.pdf?arnumber=9805835
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85133752265&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85133752265&origin=inward
ID情報
  • DOI : 10.1109/jmems.2022.3183611
  • ISSN : 1057-7157
  • eISSN : 1941-0158
  • SCOPUS ID : 85133752265

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