杉本真也 (Shinya Sugimoto) - マイポータル

基本情報

Silicon carbide micro-reaction-sintering using micromachined silicon molds

S Tanaka, S Sugimoto, JF Li, R Watanabe, M Esashi

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 10(1) 55-61 2001年3月
Three-Dimensional Microfabrication of Silicon Nitride for Power Microelectromechanical Systems

SUGIMOTO Shinya

The 18th Sensor Symposium 45-50 2001年
Three-dimensional micromachining of silicon nitride for power microelectromechanical systems

S Sugimoto, S Tanaka, JF Li, T Genda, R Watanabe, M Esashi

TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 2 1140-1143 2001年
Liquid jets, accelerated thrombolysis: A study for revascularization of cerebral embolism

T Kodama, M Tatsuno, S Sugimoto, H Uenohara, T Yoshimoto, K Takayama

ULTRASOUND IN MEDICINE AND BIOLOGY 25(6) 977-983 1999年7月