水原譲 (Yuzuru Mizuhara) - マイポータル

基本情報

Analysis of dopant concentration in semiconductor using secondary electron method

Y Mizuhara, J Kato, T Nagatomi, Y Takai, M Inoue

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS 42(6B) L709-L711 2003年6月
Novel floating-type low-energy ion gun for high-resolution depth profiling in ultrahigh vacuum

Y Mizuhara, J Kato, T Nagatomi, Y Takai, T Aoyama, A Yoshimoto, M Inoue, R Shimizu

SURFACE AND INTERFACE ANALYSIS 35(4) 382-386 2003年4月
Quantitative measurement of surface potential and amount of charging on insulator surface under electron beam irradiation

Y Mizuhara, J Kato, T Nagatomi, Y Takai, M Inoue

JOURNAL OF APPLIED PHYSICS 92(10) 6128-6133 2002年11月