片岡 憲一

Multi-layer electroplated micro-spring array for MEMS probe card 

Technical Digest of 17th IEEE International Conference on Micro Electro Mechanical Systems 733 2004年  

Multi-layer electroplated micro-spring array for MEMS probe card 

Technical Digest of 17th IEEE International Conference on Micro Electro Mechanical Systems 733 2004年  

Low contact force fritting probe card using buckling microcantilevers. 

Proceedings of International Test Conference 2003 (ITC2003) 1009-1013 2003年  

Electroplating Ni micro-cantilevers for low contact-force IC probing 

Sensors and Actuators A 103 166-121 2003年  

Low contact force fritting probe card using buckling microcantilevers. 

Proceedings of International Test Conference 2003 (ITC2003) 1009-1013 2003年  

Electroplating Ni micro-cantilevers for low contact-force IC probing 

Sensors and Actuators A 103 166-121 2003年  

Low contact-force and compliant MEMS probe card utilizing fritting contact 

Technical Digest of International Conference on Micro Electro Mechanical Systems 2002 364 2002年  

Low contact force probing on Cu electrodes 

Proceedings of International Test Conference 2002 424 2002年  

Low contact-force and compliant MEMS probe card utilizing fritting contact 

Technical Digest of International Conference on Micro Electro Mechanical Systems 2002 364 2002年  

Low contact force probing on Cu electrodes 

Proceedings of International Test Conference 2002 424 2002年  

走査型力顕微鏡のための三次元駆動圧電マイクロカンチレバー 

精密工学会誌 66(6) 965-969 2000年  

Fritting Contacts utilized for micromachined wafer probe card 

Proceedings-International Conference and Poster Exhibition on Micro Materials(Micro Mat 2000) 967 2000年