2009年6月
エキシマレーザー照射によるh-BNからのアブレーションプラズマの特性
真空
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- 巻
- 52
- 号
- 6
- 開始ページ
- 369
- 終了ページ
- 371
- 記述言語
- 日本語
- 掲載種別
- 研究論文(学術雑誌)
- 出版者・発行元
- 日本真空協会
Characteristics of the plume plasma produced by UV (λ=308 nm) laser ablation of a hot-pressed hexaganol boron nitride (h-BN) target have been investigated in a high vacuum at a laser power density ranging from 0.1 to 3.2×108 W/cm2. Time-resolved detection of the ablated species has been achieved by using a quadrupole mass spectrometer and an ion probe. The average kinetic energy of ablated B+ is much larger than that of B, and increases with an increase in the laser power density, whereas the acceleration of neutral B is limited. The ionization degree in the plasma varies from 0.1 to 15% with increasing laser power density. The angular distributions of the ion flux and the total particle flux can be fitted by a cosine or a bicosine function and strongly depend on the laser power density.
- ID情報
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- ISSN : 1882-2398
- J-Global ID : 200902295761982445