論文

2009年6月

エキシマレーザー照射によるh-BNからのアブレーションプラズマの特性

真空
  • 大場, 弘則
  • ,
  • 佐伯, 盛久
  • ,
  • 江坂, 文孝
  • ,
  • 山田, 洋一
  • ,
  • 山本, 博之
  • ,
  • 横山, 淳

52
6
開始ページ
369
終了ページ
371
記述言語
日本語
掲載種別
研究論文(学術雑誌)
出版者・発行元
日本真空協会

Characteristics of the plume plasma produced by UV (λ=308 nm) laser ablation of a hot-pressed hexaganol boron nitride (h-BN) target have been investigated in a high vacuum at a laser power density ranging from 0.1 to 3.2×108 W/cm2. Time-resolved detection of the ablated species has been achieved by using a quadrupole mass spectrometer and an ion probe. The average kinetic energy of ablated B+ is much larger than that of B, and increases with an increase in the laser power density, whereas the acceleration of neutral B is limited. The ionization degree in the plasma varies from 0.1 to 15% with increasing laser power density. The angular distributions of the ion flux and the total particle flux can be fitted by a cosine or a bicosine function and strongly depend on the laser power density.

リンク情報
J-GLOBAL
https://jglobal.jst.go.jp/detail?JGLOBAL_ID=200902295761982445
ID情報
  • ISSN : 1882-2398
  • J-Global ID : 200902295761982445

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