<p>We have observed permeated deuterium on stainless steel surface by electron stimulated desorption (ESD) method with scanning electron microscope (SEM). The deuterium distribution was obtained by exposing deuterium from backside of sample and ionizing permeated deuterium by scanning electron beam. The deuterium was exposed from backside at 0.1 MPa. The sample is SUS304, which contains martensite dislocations in austenite structure. Thickness and grain size are both about 100 µm. It is found that deuterium concentration on stainless steel surface depends on the grains by comparing the SEM image and the ESD ion map at 473 K.</p>