池原毅 (Tsuyoshi Ikehara) - マイポータル

基本情報

所属: 独立行政法人産業技術総合研究所集積マイクロシステム研究センターネットワークMEMS研究チーム研究員

J-GLOBAL ID: 200901027324664037
researchmap会員ID: 5000005803

外部リンク: http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=T85247657

研究キーワード

研究分野

MISC

Hydrogen permeation characteristics of thin Pd membrane prepared by microfabrication technology

Y Zhang, J Gwak, Y Murakoshi, T Ikehara, R Maeda, C Nishimura

JOURNAL OF MEMBRANE SCIENCE 277(1-2) 203-209 2006年6月
Characterization and permeation of microfabricated palladium membrane

Y Zhang, J Lu, T Ikehara, R Maeda, C Nishimura

MATERIALS TRANSACTIONS 47(2) 255-258 2006年2月
Energy Dissipation Mechanisms in PZT Thin Film Transduced Micro Cantilevers

LU Jian, IKEHARA Tsuyoshi, ZHANG Yi, MAEDA Ryutaro, MIHARA Takashi

JAPANESE JOURNAL OF APPLIED PHYSICS 45(11) 8795-8800 2006年
Fabrication of an accurately vertical sidewall for optical switch applications using deep RIE and photoresist spray coating

T Ikehara, R Maeda

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 12(1-2) 98-103 2005年12月
Applications of micro hot embossing for optical switch formation

XC Shan, T Ikehara, Y Murakoshi, R Maeda

SENSORS AND ACTUATORS A-PHYSICAL 119(2) 433-440 2005年4月
Lead zirconate titanate film formation technology with use of spray coating method

M Ichiki, LL Zhang, Z Yang, T Ikehara, R Maeda

INTEGRATED FERROELECTRICS 61 167-172 2004年
Thin film formation on non-planar surface with use of spray coating fabrication

MICROSYSTEM TECHNOLOGIES 30 1831-1834 2004年
Formation and its characteristics of ferroelectric film on non-planar substrate with spray coating method

Key Engineering Materials 269 113-116 2004年
A Polymer-Based Optical Switch Fabricated Using Silicon Process, Electroplating and Micro Hot Embossing

SHAN X. C.

INTERNATIONAL JOURNAL OF COMPUTATIONAL ENGINEERING SCIENCE 4(3) 725-728 2004年
ホットエンボスによる光スイッチ用可動ミラーアレイ構造の作製

池原毅, 単学伝, 大友誠, 前田龍太郎

電気学会論文誌E 124(10) 354-358 2004年
Mechanical strain generation in a polydiacetylene crystal due to photo-induced phase transition

JAPANESE JOURNAL OF APPLIED PHYSICS 43(2) 654-658 2004年
Fabrication of X-ray masks and applications for optical switch molding

XC Shan, R Maeda, T Ikehara, H Mekaru, T Hattori

SENSORS AND ACTUATORS A-PHYSICAL 108(1-3) 224-229 2003年11月
Lead zirconate titanate film formation technology with spray coating method

M Ichiki, LL Zhang, Z Yang, T Ikehara, R Maeda

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS 42(9B) 5927-5930 2003年9月
Thin film formation on non-planar surface

Int.J.Comp.Sci. 4 707-710 2003年
PZT Film Formation with Use of Spray Coating Method

Masaaki Ichiki, Lulu Zhang, Zhen Yang, Tsuyoshi Ikehara, Ryutaro Maeda

IEEJ Transactions on Sensors and Micromachines 123(12) 588-589 2003年
Design, fabrication and testing of new comb actuators realizing three-dimensional continuous motions

Y Ando, T Ikehara, S Matsumoto

SENSORS AND ACTUATORS A-PHYSICAL 97-8 579-586 2002年4月
Anisotropic thermal strain measurement at the thermochromic phase transition in a polydiacetylene crystal

PHYSICAL REVIEW B 64(9) 92202- 2001年

所属学協会

共同研究・競争的資金等の研究課題

MEMS

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MEMS

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