2006年2月
High-speed fabrication of super-resolution near-field structure read-only memory master disc using PtOx thermal decomposition lithography
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS
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- 巻
- 45
- 号
- 2B
- 開始ページ
- 1379
- 終了ページ
- 1382
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1143/JJAP.45.1379
- 出版者・発行元
- INST PURE APPLIED PHYSICS
We propose a new lithography technique using thermal decomposition of platinum oxide (PtQ(x)) for high-throughput master disc fabrication. The smallest pit size was evaluated to be 50 nm using a laser wavelength of 405 nm and a numerical aperture (NA) of 0.65; hence, it is one-twelfth the optical spot size. In addition, fabrication of pits with different shapes was examined, and its effects on super-resolution near-field structure (super-RENS) disc properties were studied. The readout signal characteristic evaluated on the basis of carrier-to-noise ratio (CNR) with an elliptical pit was 7 dB larger than that of the round one. The results demonstrated that this high-throughput fabrication technique is also useful for controling the pit shape for CNR improvement of super-resolution readout.
- リンク情報
- ID情報
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- DOI : 10.1143/JJAP.45.1379
- ISSN : 0021-4922
- CiNii Articles ID : 150000046487
- Web of Science ID : WOS:000235978200071