南川俊治 (Toshiharu Minamikawa) - マイポータル

基本情報

Annealing Effect of Pb(Zr,Ti)O3 Ferroelectric Capacitor in Active Ammonia Gas Cracked by Catalytic Chemical Vapor Deposition System

Minamikawa Toshiharu, Yonezawa Yasuto, Nakamura Takashi, Fujimori Yoshikazu, Masuda Atsushi, Matsumura Hideki

Jpn. J. Appl. Phys. Vol.38 (1999) 5358 38(9) 5358-5360 1999年9月30日
Annealing Effect of Pb(Zr, Ti)O3 Ferroelectric Capacitor in Active Ammonia Gas Cracked by Catalytic Chemical Vapor Deposition System

Minamikawa Toshiharu, Yonezawa Yasuto, Nakamura Takashi, Fujimori Yoshikazu, Masuda Atsushi, Matsumura Hideki

Japanese journal of applied physics. Pt. 1, Regular papers & short notes 38(9) 5358-5360 1999年9月30日