KHAJORNRUNGRUANG Panart

J-GLOBAL         Last updated: Nov 22, 2018 at 03:08
 
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Name
KHAJORNRUNGRUANG Panart
Affiliation
Kyushu Institute of Technology
Section
Faculty of Computer Science and Systems Engineering, Department of Mechanical Information Science and Technology
Job title
Associate Professor
Degree
Doctor of Philosophy in Engineering(Osaka University)

Research Areas

 
 

Academic & Professional Experience

 
2005
 - 
2006
 Research Associate,The Strategy Office,Kyushu Institute of Technology
 
2006
 - 
2007
 Research Associate,Advanced Mold and Die Technology Center,Kyushu Institute of Technology
 
2007
 - 
2014
 Assistant Professor,Advanced Mold and Die Technology Center,Kyushu Institute of Technology
 
2014
 - 
2016
 Assistant Professor,Department of Mechanical Information Science and Technology,Faculty of Computer Science and Systems Engineering,Kyushu Institute of Technology
 
2016
   
 
 Associate Professor,Department of Mechanical Information Science and Technology,Faculty of Computer Science and Systems Engineering,Kyushu Institute of Technology
 

Education

 
 
 - 
2002
Graduate School, Division of Engineering, Osaka University
 
 
 - 
2000
Department of Mechanical Engineering, Faculty of Engineering, Osaka University
 

Committee Memberships

 
2008
   
 
 Intelligent Nano-Measure, JSPE
 
2008
   
 
 Planarization and CMP Technical Committee, JSPE Organizing Committee of ICPT2009(2009)
 
2011
   
 
 Affiliate, JSPE
 

Misc

 
Angshuman Pal, Panart Khajornrungruang, S. V. Babu
RSC Advances   5 71830-71834   2015
Angshuman Pal, Panart Khajornrungruang, Christopher Netzband, Sriveda Alety, S. V. Babu
Nanotechnology   27(7) 075708 (1)-075708 (10)   2016
Panart Khajornrungruang, Keiichi Kimura, Takahisa Okuzono, Keisuke Suzuki, and Takashi Kushida
Japanese Journal of Applied Physics   51(5)    2012
Novel edge profile measurement of micro cutting tool by laser diffraction
Panart Khajornrungruang,Takashi Miyoshi,Yasuhiro Takaya,Satoru Takahashi,Takashi Harada and Soichiro Isago
Proceedings of the 4th European Society for Precision Engineering and Nanotechnology (euspen) International Topical Conference   463-466   2003

Conference Activities & Talks

 
Dynamical Observation of Slurry Fine Particle in CMP Process
Proceedings of JSPE Kyushu Region Conference 2009   2009   
20305 Study on material removal model in CMP process : 4th report : Study on functionality of fine particles in slurry for oxide CMP process
The Proceedings of Conference of Kanto Branch   2010   
307 Study on Micro Pattern Pad Applied with MEMS Technology : Comparison of Polishing Rates with Two Types Polishing Pads
The Proceedings of Conference of Kyushu Branch   2010   
309 The observation of particle motion in the slurry in ILD-CMP process
The Proceedings of Conference of Kyushu Branch   2010   
Study on kinetic contact between polishing pad and wafer during CMP
Proceedings of JSPE Semestrial Meeting   2010   

Association Memberships

 
 

Works

 
Study on electro plating and etching for metal interconnect in integrated circuit assisted with ArF excimer laser
2008 - 2010

Research Grants & Projects

 
Dynamical Nano-Particle Visualization in Nano-scale Interfacial
Ordinary Research
Project Year: 2008   
Chemical Mechanical Polishing
Project Year: 2005   
On-Machine sub-micrometer Measurement of Micro Cutting Tool using Laser Diffraction
Project Year: 2005