2009年4月
Chemical Shift of Electron Energy-Loss Near-Edge Structure on the Nitrogen K-Edge and Titanium L-3-Edge at TiN/Ti Interface
MICROSCOPY AND MICROANALYSIS
- ,
- ,
- ,
- ,
- 巻
- 15
- 号
- 2
- 開始ページ
- 106
- 終了ページ
- 113
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1017/S1431927609090175
- 出版者・発行元
- CAMBRIDGE UNIV PRESS
We investigated the chemical shift of the electron energy-loss near-edge structure (ELNES) for the nitrogen K-edge and titanium L-3-edge measured from the interface region between a titanium nitride layer and a titanium layer. Both the titanium nitride and titanium layers were prepared by a sputtering method. Elemental analysis for nitride and titanium in the vicinity of the interface region was performed using a standard technique in electron energy-loss spectroscopy. It was demonstrated that both the ELNES of nitrogen K-edge and titanium L-3-edge presented the chemical shift, more or less, depending on the composition of TiNx. The experimental findings were interpreted using a first-principles band structure calculation. The chemical shifts of nitrogen K-edge and titanium L-3-edge can be used as fingerprinting for readily distinguishing the composition of TiNx.
- リンク情報
- ID情報
-
- DOI : 10.1017/S1431927609090175
- ISSN : 1431-9276
- J-Global ID : 200902286628876064
- Web of Science ID : WOS:000264861800004