Takeshi HIGASHIGUCHI

J-GLOBAL         Last updated: Sep 30, 2019 at 22:07
 
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Name
Takeshi HIGASHIGUCHI
Section
Faculty of Engineering
Degree
Ph.D.(Utsunomiya University, 2001)
Research funding number
80336289
ORCID ID
0000-0003-3940-7126

Research Areas

 
 

Academic & Professional Experience

 
Jun 2006
 - 
Today
Professor, Utsunomiya University
 
Sep 2001
 - 
May 2006
Research Associate, University of Miyazaki Faculty of Engineering
 

Awards & Honors

 
Oct 2018
Best Lecture Award
 
Feb 2018
CERTIFICATE OF APPRECIATION AWARDED, SPIE
 
Sep 2017
Best Lecture Award
 
Jul 2017
(Award), JSPS
 
May 2015
Paper Award
 

Published Papers

 
Toshitaka Wakayama, Natsumi Shinozaki, Misaki Shoji, Takayuki Ishiyama, Kazuyuki Sakaue, Taisuke Miura, Takeo Ejima, and Takeshi Higashiguchi
114(23) 231101-1-231101-5   Jun 2019   [Refereed]
We propose and demonstrate production of a supercontinuum vector beam by independent manipulations of an angular polarization and a geometric phase. The proposed concept consists of left- and right-hand vortex phase cancelation. Two-dimensional di...
Christian John, Maki Kishimoto, Tomoyuki Johzaki, Takeshi Higashiguchi, Noboru. Kakunaka, Yasuhiro Matsumoto, Noboru Hasegawa, Masaharu Nishikino, Takeo Ejima, Atsushi Sunahara, Takuma Endo, and Shinichi Namba
Optics Letters   44(6) 1439-1442   Mar 2019   [Refereed]
To generate bright water-window (WW) soft x rays (2.3–4.4 nm), gold slab targets were irradiated with laser pulses (1064 nm, 7 ns, 1 J). Emission spectroscopy showed that the introduction of low-pressure nitrogen enhanced the soft x-ray yield emit...
Hiroki Oikawa, Takeshi Higashiguchi, and Hitoshi Hayano
Japanese Journal of Applied Physics (Brief Note)   58(2) 028001-1-028001-4   Feb 2019   [Refereed]
We designed a niobium-based mushroom-shaped cavity for evaluating the critical magnetic field of superconducting multilayer thin films. The distribution of the magnetic field strength at a radio frequency (RF) of 5.2 GHz was calculated in a sample...
Misaki Shoji, Natsumi Shinozaki, Takuya Gisuji, Yusuke Fujii, Masayuki Iigo, Kenji Yamane, Kazuyuki Sakaue, Taisuke Miura, and Takeshi Higashiguchi
Journal of the Optical Society of America B   36(1) 48-52   Jan 2019   [Refereed]
We report the spectral behavior and averaged output power of a supercontinuum beam generated with an ytterbium (Yb)-doped double-clad passive fiber as a gain media for an amplifier with a mode-locked oscillator at a repetition rate of 10 MHz. The ...
Goki Arai, Hiroyuki Hara, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Hayato Ohashi, Shinichi Namba, Atsushi Sunahara, Akira Sasaki, Masaharu Nishikino, Gerry O’Sullivan, and Takeshi Higashiguchi
Optics Express   26(21) 27748-27756   Oct 2018   [Refereed]
We demonstrate intense emission in the water-window soft x-ray spectral region by controlling the spectral behavior through changing the balance between emissivity and self-absorption in an expanding plasma. The number of photons obtained from a d...
Ragava Lokasani, John Sheil, Ellie Floyd Barte, Hiroyuki Hara, Toshiki Tamura, Takuya Gisuji, Takeshi Higashiguchi, Chihiro Suzuki, Padraig Dunne, Gerry O’Sullivan, and Jiri Limpouch
Journal of Physics B   51(21) 215001-1-215001-9   Oct 2018   [Refereed]
XUV spectra of 150 ps laser-produced samarium (Sm) plasmas in the 1.8–10 nm wavelength region, where Δn = 1, n = 4 − n = 5 and Δn = 0, n = 4 − n = 4 transitions dominate the observed emission, were investigated experimentally and theoretically. Ab...
Tatsunori Shibuya, Takashi Takahashi, Kazuyuki Sakaue, Thanh Hung Dinh, Hiroyuki Hara, Takeshi Higashiguchi, Masahiko Ishino, Yuya Koshiba, Masaharu Nishikino, Hiroshi Ogawa, Masahito Tanaka, Masakazu Washio, Yohei Kobayashi, and Ryunosuke Kuroda
Applied Physics Letters   113(17) 151901-1-151901-4   Oct 2018   [Refereed]
A free-electron laser (FEL) is a robust tool for studying the interaction of intense X-rays with matter. In this study, we investigate the damage threshold and morphology of fused silica irradiated by extreme ultraviolet femtosecond pulses of a FE...
Chihiro Suzuki, Izumi Murakami, Fumihiro Koike, Takeshi Higashiguchi, Hiroyuki A. Sakaue, Naoki Tamura, Shigeru Sudo, and Gerry O’Sullivan
X-Ray Spectrometry      Jun 2019   [Refereed]
We are developing an experimental database of extreme ultraviolet spectra from highly charged ions using optically thin high‐temperature plasmas produced in the Large Helical Device. Spectra from a variety of elements with atomic numbers ranging f...
Hayato Ohashi, Hiroyuki Hara, Goki Arai, Tadashi Hatano, Takeo Ejima, Chihiro Suzuki, Shinichi Namba, Akira Sasaki, Masaharu Nishikino, Gerry O’Sullivan, and Takeshi Higashiguchi
Applied Physics B   124(10) 193-1-193-6   Sep 2018   [Refereed]
Laser-produced medium element plasma sources are being considered as strong candidates for in vivo photographic imaging of biological samples in laboratory-scale water-window soft X-ray microscopes. We explored spectral changes in the emission fro...
Takeo Ejima, Yuichi Ono, Keisuke Ito, Hiromu Kawasaki, Takeshi Higashiguchi, Shigenobu Tone, and Tadashi Hatano
Microscopy and Microanalysis   24 214-215   Aug 2018   [Refereed]
Hiroki Oikawa, Takeshi Higashiguchi, and Hitoshi Hayano
Review of Scientific Instruments   89(7) 076102-1-076102-3   Jul 2018   [Refereed]
We designed a mushroom-shaped Al test cavity for measurement of the critical magnetic field at a radio frequency microwave with a frequency of 5.2 GHz. The characteristics of the Al test cavity are characterized toward the evaluation of the superc...
Hiroyuki Hara, Hiromu Kawasaki, Toshiki Tamura, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Hayato Ohashi, Shinichi Namba, Atsushi Sunahara, Akira Sasaki, Masaharu Nishikino, Gerry O’Sullivan, and Takeshi Higashiguchi
Optics Letters   43(15) 3750-3753   Jul 2018   [Refereed]
The effect of optical thickness in a bismuth water-window soft x-ray source is considered by comparing the emission from laser-produced plasmas of a 7.5% atomic density foam target and a solid-density target. The number of photons recorded in the ...
Toshitaka Wakayama, Takeshi Higashiguchi, Kazuyuki Sakaue, Masakazu Washio, and Yukitoshi Otani
Scientific Reports   8 8690-1-8690-11   Jun 2018   [Refereed]
We demonstrate the creation of a vector beam by tailoring geometric phase of left- and right- circularly polarized beams. Such a vector beam with a uniform phase has not been demonstrated before because a vortex phase remains in the beam. We focus...
Influence of short pulse duration of carbon-dioxide laser pulse for extreme ultraviolet emission
Japanese Journal of Applied Physics (Rapid Communication)   57(7) 070311-1-070311-5   Jun 2018   [Refereed]
We describe the production of mid-infrared (mid-IR) short carbon dioxide (CO2) laser pulses with variable durations from 3 to 15 ns at a maximum pulse energy of 150 mJ/pulse using a germanium (Ge) substrate semiconductor switch and a multipass amp...
Toshitaka Wakayama, Yuta Takahashi, Yuichi Ono, Yusuke Fujii, Takuya Gisuji, Takuto Ogura, Natsumi Shinozaki, Shun Yamauchi, Misaki Shoji, Hiromu Kawasaki, Takeshi Higashiguchi, and Toru Yoshizawa
Applied Optics   57(19) 5371-5379   Jun 2018   [Refereed]
We demonstrate an inner surface profile measurement that has a smooth spatial distribution. A supercontinuum beam suppresses the speckle contrast to 22% and the standard deviation of the point cloud to 40%, compared to equivalent values obtained b...
Ellie Floyd Barte, Hiroyuki Hara, Toshiki Tamura, Takuya Gisuji, When-Bo Chen, Ragava Lokasani, Tadashi Hatano, Takeo Ejima, Weihua Jiang, Chihiro Suzuki, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Akira Sasaki, Takeshi Higashiguchi, and Jiri Limpouch
Journal of Applied Physics   123(18) 183301-1-183301-6   May 2018   [Refereed]
We have characterized the soft x-ray and extreme ultraviolet (XUV) emission of rhodium (Rh) plasmas produced using dual pulse irradiation by 150-ps or 6-ns pre-pulses, followed by a 150-ps main pulse. We have studied the emission enhancement depen...
Selection of target elements for laser-produced plasma soft x-ray sources
Optics Letters   43(9) 2042-2045   Apr 2018   [Refereed]
We demonstrated the upper limitation to the number of shots, i.e., target lifetime, together with the number of photons emitted in the water-window soft x-ray spectral region from a number of targets used as sources in this spectral region, for mu...
Reiho Amano, Thanh-Hung Dinh, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Taisuke Miura, and Takeshi Higashiguchi
X-Ray Lasers 2016 (Proceedings on 15th International Conference on X-Ray Lasers 2016)   367-371   Feb 2018   [Refereed]
We produced 3–15 ns pulses at 10.6 μm wavelength to investigate efficient extreme ultraviolet and soft X-ray sources. A master oscillator power amplifier (MOPA) laser operating at a repetition rate of 10 Hz was built on transversely excited atmosp...
Takeo Ejima, Yoshiki Kondo, Yuichi Ono, Thanh-Hung Dinh, Takeshi Higashiguchi, and Tadashi Hatano
X-Ray Lasers 2016 (Proceedings on 15th International Conference on X-Ray Lasers 2016)   395-399   Feb 2018   [Refereed]
For the sake of observation of samples in solution, a contact-type soft X-ray microscope is under construction by the use of both an optical microscope for readout and a laser-produced plasma light source with a heavy metal target. Edge response i...
Bowen Li, Takamitsu Otsuka, Emma Sokell, Padraig Dunne, Gerry O’Sullivan, Hiroyuki Hara, Goki Arai, Toshiki Tamura, Yuichi Ono, Thanh-Hung Dinh, and Takeshi Higashiguchi
European Physical Journal D   71(11) 278-1-278-9   Nov 2017   [Refereed]
Soft X-ray (SXR) spectra from hafnium and tantalum laser produced plasmas were recorded in the 1–7 nm region using two Nd:YAG lasers with pulse lengths of 170 ps and 10 ns, respectively, operating at a range of power densities. The maximum focused...
Gerry O’Sullivan, Padraig Dunne, Takeshi Higashiguchi, Domagoj Kos, Oisín Maguire, Takanori Miyazaki, Fergal O’Reilly, John Sheil, Emma Sokell, and Deirdre Kilbane
Nuclear Instruments and Methods in Physics Research Section B   408 3-8   Oct 2017   [Refereed]
After almost three decades of research, commercial sources for extreme ultraviolet lithography (EUVL) at 13.5 nm are now being manufactured and EUVL is expected to be introduced finally in 2018 or 2019. The source is based on laser produced plasma...
Chihiro Suzuki, Takeshi Higashiguchi, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Yoshiki Kondo, Thanh-Hung Dinh, Fumihiro Koike, Izumi Murakami, and Gerry O’Sullivan
Nuclear Instruments and Methods in Physics Research Section B   408 253-256   Oct 2017   [Refereed]
We have observed soft X-ray spectra from highly charged ions of seven different lanthanide elements with atomic numbers ranging from 60 to 70 in laser-produced plasmas (LPPs) using CO2 and Nd:YAG laser systems, the wavelengths of which are 10.6 μm...
Hiroyuki Hara, Hayato Ohashi, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Akira Sasaki, Chihiro Suzuki, Naoki Tamura, Hiroyuki sakaue, Daiji Kato, Izumi Murakami, Takeshi Higashiguchi, and LHD Experiment Group
APL Photonics   2(8) 081301-1-081301-7   Aug 2017   [Refereed]
e soft x-ray spectra of heavy element plasmas are frequently dominated by unresolved transition array (UTA) emission. We describe the spectral evolution of an intense UTA under optically thin conditions in platinum plasmas. The UTA was observed to...
Y. Takeiri, T. Higashiguchi et al.
Nuclear Fusion   57 102023-1-102023-10   Aug 2017   [Refereed]
As the finalization of a hydrogen experiment towards the deuterium phase, the exploration of the best performance of hydrogen plasma was intensively performed in the large helical device. High ion and electron temperatures, T i and T e, of more th...
Toshitaka Wakayama, Takeshi Higashiguchi, and Yukitoshi Otani
Optical Review   24(3) 449-461   Jun 2017   [Refereed][Invited]
We review the generation of the determined vectorial vortex beams in the terahertz (THz) beams at frequencies of 0.16 and 0.36 THz, and intense middle infrared pulsed beam at 10.6 µm by use of an achromatic axially symmetric waveplate. It is possi...
Ragava Lokasani, Ellie Floyd Barte, Petr Gavrilov, Petr Hribek, Alexandr Jancarek, Domagoj Kos, Michal Nevrkla, Ladislav Pina, Takeshi Higashiguchi, Gerry O’Sullivan, and Jiri Limpouch
Journal of Physics B   50(14) 145001-1-145001-10   Jun 2017   [Refereed]
The soft x-ray emission spectra of femtosecond-laser-produced plasmas from 2nd row transition elements from yttrium (Z = 39) to palladium (Z = 46), with the exception of technetium (Z = 43), were measured in the 1–5 nm region. Plasmas were produce...
John Sheil, Padraig Dunne, Takeshi Higashiguchi, Domagoj Kos, Elaine Long, Takanori Miyazaki, Fergal O’Reilly, Gerard O’Sullivan, Paul Sheridan, Chihiro Suzuki, Emma Sokell, Elgiva White, and Deirdre Kilbane
Journal of Physics B   50(6) 065006-1-065006-8   Mar 2017   [Refereed]
Soft x-ray emission spectra of dysprosium, erbium and thulium ions created in laser-produced plasmas were recorded with a flat-field grazing-incidence spectrometer in the 2.5–8 nm spectral range. The ions were produced using an Nd:YAG laser of 7 n...
Chihiro Suzuki, Izumi Murakami, Fumihiro Koike, Naoki Tamura, Hroyuki A. Sakaue, Shigeru Morita, Motoshi Goto, Daiji Kato, Hayato Ohashi, Takeshi Higashiguchi, Shigeru Sudo, and Gegard O’Sullivan
Plasma Physics and Controlled Fusion   59(1) 014009-1-014009-8   Jan 2017   [Refereed][Invited]
We report recent results of extreme ultraviolet (EUV) spectroscopy of highly charged heavy ions in plasmas produced in the Large Helical Device (LHD). The LHD is an ideal source of experimental databases of EUV spectra because of high brightness a...
Siva Sankar Nagisetty, Patricie Severova, Taisuke Miura, Martin Smrz, Hitoe Kon, Miyuki Uomoto, Takehito Shimatsu, Masato Kawasaki, Takeshi Higashiguchi, Akira Endo, and Tomas Mocek
Laser Physics Letters   14(1) 015001-1-015001-6   Jan 2017   [Refereed]
We demonstrated the laser performance of an Yb:YAG/YAG composite ceramic laser medium mounted on an aluminium heatsink via atomic diffusion bonding (ADB) technique using nanocrystalline metal films at room temperature in air. The surface temperatu...
Thanh-Hung Dinh, Yoshiki Kondo, Toshiki Tamura, Yuichi Ono, Hiroyuki Hara, Hiroki Oikawa, Yoichi Yamamoto, Masahiko Ishino, Masaharu Nishikino, Tetsuya Makimura, Padraig Dunne, Gerry O’Sullivan, Shigeru Ohta, Ken Kitano, Takeo Ejima, Hatano Tadashi, and Takeshi Higashiguchi
Review of Scientific Instruments   87(12) 123106-1-123106-7   Dec 2016   [Refereed]
A flat-field grazing incidence spectrometer operating on the spectral region from 1 to 10 nm was built for research on physics of high temperature and high energy density plasmas. It consists of a flat-field grating with 2400 lines/mm as a dispers...
Ragava Lokasani, Goki Arai, Yoshiki Kondo, Hiroyuki Hara, Thanh-Hung Dinh, Takeo Ejima, Tadashi Hatano, Weihua Jiang, Tetsuya Makimura, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Takeshi Higashiguchi, and Jiri Limpouch
Applied Physics Letters   109(19) 194103-1-194103-5   Nov 2016   [Refereed]
We demonstrate efficient enhancement of soft X-ray (SXR) emission from molybdenum plasmas produced using dual pulse irradiation, in which 10-ns and 150-ps pre-pulses were followed by a 150-ps main pulse. The number of photons was observed to be 5....
Takeshi Higashiguchi
Radiation Chemistry   (102) 3-9   Oct 2016   [Refereed][Invited]
Lithography tools are being developed to semiconductor manufacturers for high volume manufacturing (HVM) using extreme ultraviolet (EUV) lithography at 13.5 nm, which is based on the availability of Mo/Si multilayer mirrors with a reflectivity of ...
Hiroyuki Hara, Goki Arai, Yoshiki Kondo, Thanh-Hung Dinh, Padraig Dunne, Gerry O’Sullivan, Takeo Ejima, Tadashi Hatano, Weihua Jiang, Masaharu Nishikino, Akira Sasaki, Atsushi Sunahara, and Takeshi Higashiguchi
Applied Physics Express   9(6) 066201-1-066201-4   May 2016   [Refereed]
We characterized the spectral structure of the soft X-ray emission and determined the plasma parameters in laser-produced highly charged platinum plasmas. The spectral structure observed originated from Pt21+ to Pt34+ ions, emissions from which ov...
Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryouichi Hirose, Takeo Ejima, Hayato Ohashi, Masaharu Nishikino, Enda Scally, Hiroaki Nshimura, Hiroshi Azechi, and Gerard O’Sullivan
Journal of Physics: Conference Series   688(1) 012046-1-012046-4   Apr 2016   [Refereed]
Photo-lithography is a key technology for volume manufacture of high performance and compact semiconductor devices. Smaller and more complex structures can be fabricated by using shorter wavelength light in the photolithography. One of the most cr...
Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Chihiro Suzuki, Kentaro Tomita, Masaharu Nishikino, Shinsuke Fujioka, Akira Endo, Bowen Li, Takamitsu Otsuka, Padraig Dunne, and Gerry O’Sullivan
Journal of Physics: Conference Series   688(1) 012079-1-012079-4   Apr 2016   [Refereed]
We demonstrate the extreme ultraviolet (EUV) and soft x-ray sources in the 2 to 7 nm spectral region related to the beyond EUV (BEUV) question at 6.x nm and the water window source based on laser-produced high-Z plasmas. Resonance emission from mu...
Toshitaka Wakayama, Takeshi Higashiguchi, and Yukitoshi Otani
   Jan 2016
Precise control of polarization in a 10.6μm, sub-10mJ, 15ns vectorial vortex beam using an achromatic axially symmetric waveplate may find applications in ultra-precise micromachining.
Tao Wu, Takeshi Higashiguchi, Bowen Li, Goki Arai, Hiroyuki Hara, Yoshiki Kondo, Takanori Miyazaki, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell, Gerry O’Sullivan
Journal of Physics B   49(3) 035001-1-035001-10   Jan 2016   [Refereed]
The unresolved transition arrays (UTAs) emitted from laser produced bismuth (Bi) plasma sources show potential for single-shot live cell imaging. We have measured extreme ultraviolet spectra from bismuth laser produced plasmas in the 1–7 nm region...
Hayato Ohashi and Takeshi Higashiguchi
Journal of Atomic Collision Research   13(1) 5-14   Jan 2016   [Refereed][Invited]
Gerry O’Sullivan, Padraig Dunne, Takeshi Higashiguchi, Bowen Li, Luning Liu, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, Paul Sheridan, Emma Sokell, Chihiro Suzuki, and Tao Wu
Journal of Physics: Conference Series   635 012026-1-012026-8   Dec 2015   [Refereed][Invited]
The identification of sources for applications that include nanolithography, surface patterning and high resolution imaging is the focus of a considerable activity in the extreme ultraviolet (EUV) or soft x-ray (SXR) spectral regions. We report on...
Tao Wu, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Goki Arai, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell and Gerry O’Sullivan
Journal of Physics B   48(24) 245007-1-245007-10   Nov 2015   [Refereed]
XUV spectra of ns- and ps-laser produced platinum (Pt) plasmas in the 1–7 nm wavelength region, where Δn = 1 n = 4–5 and Δn = 0 n = 4-4 transitions dominate the observed emission, were investigated experimentally and theoretically. Ab initio calcu...
Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Weihua Jiang, Taisuke Miura, Akira Endo, Takeo Ejima, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara, and Takeshi Higashiguchi
Journal of Applied Physics   118(19) 193301-1-193301-7   Nov 2015   [Refereed]
The extreme ultraviolet (EUV) emission and its spatial distribution as well as plasma parameters in a microplasma high-brightness light source are characterized by the use of a two-dimensional radiation hydrodynamic simulation. The expected EUV so...
Thanh-Hung Dinh, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Shinsuke Fujioka, Noboru Hasegawa, Tetsuya Kawachi, Masaharu Nishikino, and Takeshi Higashiguchi
Applied Physics Letters   107(12) 121101-1-121101-5   Sep 2015   [Refereed]
We have characterized the spectral structure and the temporal history of the laser-produced high-Z multi-charged ion plasmas for the efficient water window soft x-ray sources. Strong unresolved transition array emission was observed due to 4d–4f a...
Bowen Li, Hiroyuki Hara, Yuhei Suzuki, Goki Arai, Takeshi Higashiguchi, Hayato Ohashi, Weihua Jiang, Tetsuya Makimura, Hiroyuki A. Sakaue, Chihiro Suzuki, Daiji Kato, Izumi Murakami, Padraig Dunne, Elaine Long, Paul Sheridan, Ximeng Chen, and Gerry O’Sullivan
Journal of Applied Physics   118(7) 073302-1-073302-8   Aug 2015   [Refereed]
We report on the usefulness of germanium (Ge) and gallium (Ga) plasmas as potential extreme ultraviolet (EUV) sources at both 6.x and 13.5 nm, wavelengths of interest for lithography and metrology applications. Spectra from plasmas produced using ...
Toshitaka Wakayama, Hiroki Oikawa, Atsushi Sasanuma, Goki Arai, Yusuke Fujii, Thanh-Hung Dinh, Takeshi Higashiguchi, Kazuyuki Sakaue, Masakazu Washio, Taisuke Miura, Akihiko Takahashi, Daisuke Nakamura, Tatsuo Okada, Motoki Yonemura, and Yukitoshi Otani
Applied Physics Letters   107(8) 081112-1-081112-5   Aug 2015   [Refereed]
We demonstrated the generation of the intense radially polarized mid-infrared optical vortex at a wavelength of 10.6 μm by use of a passive axially symmetric zinc selenide (ZnSe) waveplate with high energy pulse throughput. The phase of the radial...
Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
Journal of Physics B   48(14) 144011-1-144011-7   May 2015   [Refereed]
The characteristics of soft x-ray emission from optically thin high-Z plasmas of gold, lead and bismuth were investigated with the large helical device. Compared to optically thicker laser-produced plasmas, significantly different spectral structu...
Tao Wu, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Goki Arai, Thanh-Hung Dinh, Padraig Dunne, Fergal O’Reilly, Emma Sokell, Luning Liu, and Gerry O’Sullivan
Journal of Physics B   48(16) 165005-1-165005-8   Jul 2015   [Refereed]
Extreme ultraviolet spectra of highly-charged rhenium ions were observed in the 1–7 nm region using two Nd:YAG lasers with pulse lengths of 150 ps and 10 ns, respectively, operating at a number of laser power densities. The maximum focused peak po...
Gerry O’Sullivan, Bowen Li, Rebekah D’Arcy, Padraig Dunne, Paddy Hayden, Deirdre Kilbane, Tom McCormack, Hayato Ohashi, Fergal O’Reilly, Paul Sheridan, Emma Sokell, Chihiro Suzuki, and Takeshi Higashiguchi
Journal of Physics B   48(14) 144025-1-144025-16   May 2015   [Refereed][Invited]
The primary requirement for the development of tools for extreme ultraviolet lithography (EUVL) has been the identification and optimization of suitable sources. These sources must be capable of producing hundreds of watts of extreme ultraviolet (...
Gerry O’Sullivan, Bowen Li, Padraig Dunne, Paddy Hayden, Deirdre Kilbane, Ragava Lokasani, Elaine Long, Hayato Ohashi, Fergal O’Reilly, John Sheil, Paul Sheridan, Emma Sokell, Chihiro Suzuki, Elgiva White, and Takeshi Higashiguchi
Physica Scripta   90(5) 054002-1-054002-8   Apr 2015   [Refereed][Invited]
Lithography tools are being built and shipped to semiconductor manufacturers for high volume manufacturing using extreme ultraviolet lithography (EUVL) at a wavelength of 13.5 nm. This wavelength is based on the availability of Mo/Si multilayer mi...
Chihiro Suzuki, Izumi Murakami, Fumihiro Koike, Takeshi Higashiguchi, and Hayato Ohashi
Journal of Plasma and Fusion Research   91(4) 285-290   Apr 2015   [Refereed][Invited]
Tao Wu, Takeshi Higashiguchi, Bowen Li, Goki Arai, Hiroyuki Hara, Yoshiki Kondo, Takanori Miyazaki, Thanh-Hung Dinh, Fergal O’Reilly, Emma Sokell, and Gerry O’Sullivan
Optics Communications   385 143-152   Jan 2017   [Refereed]
Soft x-ray and extreme ultraviolet (XUV) spectra from lead (Pb, Z=82) laser-produced plasmas (LPPs) were measured in the 1.0–7.0 nm wavelength region employing a 150-ps, 1064-nm Nd:YAG laser with focused power densities in the range from 3.1×1013 ...
Toshitaka Wakayama, Takeshi Higashiguchi, Hiroki Oikawa, Kazuyuki Sakaue, Masakazu Washio, Motoki Yonemura, Toru Yoshizawa, J. Scott Tyo, and Yukitoshi Otani
Scientific Reports   5 9416-1-9416-9   Mar 2015   [Refereed]
Vectorial vortex analysis is used to determine the polarization states of an arbitrarily polarized terahertz (0.1–1.6 THz) beam using THz achromatic axially symmetric wave (TAS) plates, which have a phase retardance of Δ = 163° and are made of pol...
Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryoichi Hirose, Takeo Ejima, Hayato Ohashi, Masaharu Nishikino, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Tatsuya Yanagida, Hiroshi Azechi, and Hiroaki Nishimura
Applied Physics Letters   106(12) 121109-1-121109-4   Mar 2015   [Refereed]
We present a benchmark measurement of the electron density profile in the region where the electron density is 1019 cm–3 and where the bulk of extreme ultraviolet (EUV) emission occurs from isotropically expanding spherical high-Z gadolinium plasm...
Chihiro Suzuki, Fumihiro Koike, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Hiroyuki Sakaue, Nobuyuki Nakamura, Shigeru Morita, Motoshi Goto, Daiji Kato, Tomohide Nakano, Takeshi Higashiguchi, Colm Harte, and Gerry O'Sullivan
Physica Scripta   89(11) 114009-1-114009-7   Nov 2014   [Refereed][Invited]
We present recent results on the extreme ultraviolet (EUV) spectroscopy of highly charged high Z ions in plasmas produced in the Large Helical Device (LHD) at the National Institute for Fusion Science. Tungsten, bismuth and lanthanide elements hav...
Thanh-Hung Dinh, Yuhei Suzuki, Ryouichi Hirose, Hiroyuki Hara, Hayato Ohashi, Padraig Dunne, Gerry O’Sullivan, Atsushi Sunahara, and Takeshi Higashiguchi
Review of Scientific Instruments   85(11) 116104-1-116104-3   Nov 2014   [Refereed]
We report on production of volume-limited dot targets based on electron beam lithographic and sputtering technologies for use in efficient high brightness extreme ultraviolet microplasma sources. We successfully produced cylindrical tin (Sn) targe...
Takeshi Higashiguchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Nagata, Hayato Ohashi, Bowen Li, Rebekah D'Arcy, Padraig Dunne, and Gerry O'Sullivan
Review of Scientific Instruments   85(9) 096102-1-096102-3   Sep 2014   [Refereed]
Emission spectra from multiply charged potassium ions ranging from K3+ to K5+ have been obtained in the extreme ultraviolet (EUV) spectral region. A strong emission feature peaking around 38 nm, corresponding to a photon energy of 32.6 eV, is the ...
Kensuke Yoshida, Shinsuke Fujioka, Takeshi Higashiguchi, Teruyuki Ugomori, Nozomi Tanaka, Hayato Ohashi, Masato Kawasaki, Yuhei Suzuki, Chihiro Suzuki, Kentaro Tomita, Ryoichi Hirose, Takeo Ejima, Masaharu Nishikino, Atsushi Sunahara, Enda Scally, Bowen Li, Tatsuya Yanagida, Hiroaki Nishimura, Hiroshi Azechi, and Gerry O’Sullivan
Applied Physics Express   7(8) 086202-1-086202-4   Aug 2014   [Refereed]
We demonstrate high conversion efficiency for extreme ultraviolet (EUV) emission at 6.5–6.7 nm from multiple laser beam-produced one-dimensional spherical plasmas. Multiply charged-state ions produce strong resonance emission lines, which combine ...
Amitava Roy, Goki Arai, Hiroyuki Hara, Takeshi Higashiguchi, Hayato Ohashi, Atsushi Sunahara, Bowen Li, Padraig Dunne, Gerry O'Sullivan, Taisuke Miura, Tomas Mocek, and Akira Endo
Applied Physics Letters   105(7) 074103-1-074103-4   Aug 2014   [Refereed]
We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-ba...
Hayato Ohashi, Takeshi Higashiguchi, Yuhei Suzuki, Goki Arai, Yukitoshi Otani, Toyohiko Yatagai, Bowen Li, Padraig Dunne, Gerry O’Sullivan, Weihua Jiang, Akira Endo, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Naoki Tamura, Shigeru Sudo, Fumihiro Koike, and Chihiro Suzuki
Applied Physics Letters   104(23) 234107-1-234107-5   Jun 2014   [Refereed]
Bright narrow band emission observed in optically thin plasmas of high-Z elements in the extreme ultraviolet spectral region follows a quasi-Moseley's law. The peak wavelength can be expressed as λ=(21.86±12.09)×R−1∞×(Z−(23.23±2.87))−(1.52±0.12), ...
Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Padraig Dunne, Deirdre Kilbane, Emma Sokell, and Gerry O’Sullivan
Journal of Physics B   47(7) 75001-1-75001-7   Mar 2014   [Refereed]
Extreme ultraviolet (EUV) spectra from gold laser produced plasmas were recorded in the 1–7 nm region using two Nd:YAG lasers with pulse lengths of 150 ps and 10 ns, respectively, operating at a range of power densities. The maximum focused peak p...
Takeshi Higashiguchi, Shinsuke Fujioka, Atsushi Sunahara, Tatsuya Yanagita, and Hakaru Mizoguchi
The Review of Laser Engineering   42(1) 14-22   Jan 2014   [Refereed][Invited]
Hayato Ohashi, Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Masato Kawasaki, Tatsuhiko Kanehara, Yuya Aida, Shuichi Torii, Tetsuya Makimura, Weihua Jiang, Padraig Dunne, Gerry O’Sullivan, and Nobuyuki Nakamura
Journal of Applied Physics   115(3) 033302-1-033302-5   Jan 2014   [Refereed]
We report on the identification of the optimum plasma conditions for a laser-produced plasma source for efficient coupling with multilayer mirrors at 6.x nm for beyond extreme ultraviolet lithography. A small shift to lower energies of the peak em...
Takeshi Higashiguchi, Bowen Li, Yuhei Suzuki, Masato Kawasaki, Hayato Ohashi, Shuichi Torii, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Weihua Jiang, Taisuke Miura, Akira Endo, Padraig Dunne, Gerry O’Sullivan, and Tetsuya Makimura
Optics Express   21(26) 31837-31845   Dec 2013   [Refereed]
We characterize extreme ultraviolet (EUV) emission from mid-infrared (mid-IR) laser-produced plasmas (LPPs) of the rare-earth element Gd. The energy conversion efficiency (CE) and the spectral purity in the mid-IR LPPs at λL = 10.6 μm were higher ...
S. Sakai, T. Higashiguchi, N. Yugami, N. Bobrova, Y. Sentoku, and R. Kodama
EPJ Web of Conferences   59 17002-1-17002-4   Nov 2013   [Refereed]
We have reported the argon plasma waveguide produced in an alumina (Al2O3) capillary discharge and used to guide ultrashort laser pulses at intensities of the order of 1016  W/cm2. A one-dimensional magnetohydrodynamic (MHD) code was used to evalu...
N. Yugami, F. Suzuki, H. Kashiwazaki, T. Higashiguchi, Y. Sentoku, A. Nishida, and R. Kodama
EPJ Web of Conferences   59 18007-1-18007-4   Nov 2013   [Refereed]
We demonstrate a frequency-tuning scheme that uses laser pulse duration to control the ultrafast-discharge current timescale. We also propose a simple physical model to explain the generation of terahertz radiation by laser propagation in an ultra...
A. Nishida, M. Nakata, T. Oba, T. Higashiguchi, N. Yugami, Y. Sentoku, and R. Kodama
EPJ Web of Conferences   59 19004-1-19004-4   Nov 2013   [Refereed]
We have demonstrated frequency upshift in the terahertz region by flash ionization. The magnitude of upshift frequency is tuned by the laser intensity. A proof of principle experiment has been performed with a plasma creation time scale much short...
Takeshi Higashiguchi, Takamitsu Otsuka, Teruyuki Ugomori, Shinsuke Fujioka, Hiroaki Nishimura, Chihiro Suzuki, Kazuyuki Sakaue, Masakazu Washio, and Akira Endo
Journal of Plasma and Fusion Research   89(10) 669-676   Oct 2013   [Refereed][Invited]
Takamitsu Otsuka, Takeshi Higashiguchi, and Noboru Yugami
IEEJ Journal A   133(10) 526-531   Oct 2013   [Refereed]
We have studied self-absorption effects of a laser-produced plasma (LPP) source at 6.xnm as a function of laser pulse duration and viewing angle. The spectral profiles are shown to have a strong dependence on viewing angle. Absorption effects are ...
Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
Journal of Physics: Conference Series   463(1) 012024-1-012024-4   Oct 2013   [Refereed]
Unresolved transition array (UTA) is scalable to shorter wavelengths, and we demonstrate a table-top broadband emission "water window" soft x-ray source based on laser-produced plasmas. Resonance emission from multiply charged ions merges to produ...
Gerry O’Sullivan, Thomas Cummins, Padraig Dunne, Akira Endo, Paddy Hayden, Takeshi Higashiguchi, Deirdre Kilbane, Bowen Li, Colm O’Gorman, Takamitsu Otsuka, Emma Sokell, and Noboru Yugami
Physica Scripta   T156 014105-1-014105-2   Sep 2013   [Refereed][Invited]
In 2009 industry announced that sources would be needed at 6.x nm for future lithography. The brightest sources in this wavelength region are plasmas containing gadolinium and terbium. The strongest lines result from 4d–4f lines in the spectra of ...
Takeshi Higashiguchi, Akira Endo, and Hakaru Mizoguchi
Journal of Plasma and Fusion Research   89(6) 341-348   Jun 2013   [Refereed][Invited]
Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   102(4) 041117-1-041117-4   Feb 2013   [Refereed]
Development of laser-produced plasma “water window” sources poses a major challenge in x-ray research and most effort has focused on line sources for use with zone plate optics. Here, a comparison of carbon and nitrogen line emission with that fro...
Gerry O’Sullivan, Bowen Li, Padraig Dunne, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Emma Sokell, Thomas Cummins, Colm O’Gorman, and Deirdre Kilbane
Journal of Physics: Conference Series   388(15) 152020-1-152020-1   Nov 2012   [Invited]
Recent increases in reflectance at 6.x nm of La/B4C multilayer mirrors has led to the adoption of this wavelength for the development of future sources for lithography. The emission from laser produced plasmas of Gd and Tb emit strongly in this wa...
Bowen Li, Takeshi Higashiguchi, Takamitsu Otsuka, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
Journal of Physics B   45(24) 245004-1-245004-6   Nov 2012   [Refereed]
XUV spectra of laser-produced zirconium plasmas in the 20 to 65 Å wavelength range, where 3d–4p and 3d–4f transitions dominate the observed emission, were studied experimentally and theoretically. Atomic structure calculations were performed with ...
Akinori Nishida, Noboru Yugami, Takeshi Higashiguchi, Takamitsu Otsuka, Fuminori Suzuki, Masahiro Nakata, Yasuhiko Sentoku, and Ryosuke Kodama
Applied Physics Letters   101(16) 161118-1-161118-3   Oct 2012   [Refereed]
We have demonstrated frequency up-conversion in the terahertz (THz) region by flash ionization, which occurs due a terahertz wave interacting with a plasma created by an ultrashort laser pulse. The upshift frequency is controlled by the plasma den...
Colm S Harte, Takeshi Higashiguchi, Takamitsu Otsuka, Rebekah D’Arcy, Deirdre Kilbane, and Gerry O’Sullivan
Journal of Physics B   45(20) 205002-1-205002-6   Sep 2012   [Refereed]
Tungsten will be used as a wall material in ITER and therefore will be present as an intrinsic plasma impurity with the resulting emission having the potential to be used as a plasma diagnostic. We have recorded spectra of tungsten laser produced ...
Bowen Li, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   101(1) 013112-1-013112-4   Jul 2012   [Refereed]
Recent work on multilayer mirror development for beyond extreme ultraviolet lithography indicates that their optimum reflectivity occurs at either 6.63 nm or 6.66 nm which may be too short a wavelength for Gd-based plasma sources. Calculations per...
Takeshi Higashiguchi, Nadezhda Bobrova, Pavel Sasorov, Shohei Sakai, Yasuhiko Sentoku, Ryosuke Kodama, and Noboru Yugami
Journal of Applied Physics   111(9) 093302-1-093302-7   May 2012   [Refereed]
We have reported the argon (Ar) plasma waveguide produced in an alumina (Al2O3) capillary discharge and used to guide ultrashort laser pulses at intensities of the order of 1016 W/cm2. The electron density in the plasma waveguide was measured to b...
Colm O’Gorman, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Thomas Cummins, Padraig Dunne, Emma Sokell, Gerry O’Sullivan, and Takeshi Higashiguchi
Applied Physics Letters   100(14) 141108-1-141108-4   Apr 2012   [Refereed]
We have demonstrated the effect of viewing angle on the extreme ultraviolet (EUV) emission spectra of gadolinium (Gd) near 6.7 nm. The spectra are shown to have a strong dependence on viewing angle when produced with a laser pulse duration of 10 n...
Akinori Nishida, Hiroaki Kashiwazaki, Satoshi Yoshida, Takeshi Higashiguchi, Noboru Yugami, and Ryosuke Kodama
Review of Scientific Instruments   83(4) 045104-1-045104-4   Apr 2012   [Refereed]
A tapered parallel plate waveguide was developed for frequency up-conversion experiments in the terahertz (THz) region by flash ionization. The element at the plasma-source-wave interaction area determines the conversion efficiency. It causes THz ...
Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O’Gorman, Padraig Dunne, Emma Sokell, Gerry O’Sullivan, and Takeshi Higashiguchi
Applied Physics Letters   100(6) 061118-1-061118-4   Feb 2012   [Refereed]
We have demonstrated an efficient extreme ultraviolet (EUV) source at 6.7 nm by irradiating Gd targets with 0.8 and 1.06 μm laser pulses of 140 fs to 10 ns duration. Maximum conversion efficiency of 0.4% was observed within a 0.6% bandwidth. A Far...
Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   100(1) 014103-1-014103-4   Jan 2012   [Refereed]
We demonstrate a table-top broadband emission water window source based on laser-produced high-Z plasmas. Resonance emission from multiply charged ions merges to produce intense unresolved transition arrays (UTAs) in the 2–4 nm region, extending b...
Bowen Li, Padraig Dunne, Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, and Gerry O'Sullivan
Applied Physics Letters   99(23) 231502-1-231502-3   Dec 2011   [Refereed]
Plasmas containing gadolinium have been proposed as sources for next generation lithography at 6.x nm. To determine the optimum plasma conditions, atomic structure calculations have been performed for Gd11+ to Gd27+ ions which showed that n = 4 − ...
Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Deirdre Kilbane, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   99(19) 191502-1-191502-3   Nov 2011   [Refereed]
We demonstrate an efficient extreme ultraviolet (EUV) source for operation at λ = 6.7 nm by optimizing the optical thickness of gadolinium (Gd) plasmas. Using low initial density Gd targets and dual laser pulse irradiation, we observed a maximum E...
Shohei Sakai, Takeshi Higashiguchi, Nadezhda Bobrova, Pavel Sasorov, Jun Miyazawa, Noboru Yugami, Yasuhiko Sentoku, and Ryosuke Kodama
Review of Scientific Instruments   82(10) 103509-1-103509-4   Oct 2011   [Refereed]
We report the operation of a discharge-produced argon (Ar) plasma waveguide in an alumina (Al2O3) capillary to guide a 1016-W/cm2 ultrashort laser pulse for shorter wavelength light sources at high repetition rate operation. The electron density i...
Takeshi Higashiguchi, Mami Yamaguchi, Takamitsu Otsuka, Hiromitsu Terauchi, Noboru Yugami, Toyohiko Yatagai, Rebekah D’Arcy, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   98(9) 091503-1-091503-3   Mar 2011   [Refereed]
We have characterized the emission spectrum and temporal history of a pure potassium plasma. Strong broadband emission was observed around 40 nm due to 3s−3p, 3p−3d, and 3d−4f transitions in ions ranging from K2+ to K4+ at a time-averaged electron...
Hiromitsu Terauchi, Nadezhda Bobrova, Pavel Sasorov, Takashi Kikuchi, Toru Sasaki, Takeshi Higashiguchi, Noboru Yugami, and Ryosuke Kodama
Journal of Applied Physics   109(5) 053304-1-053304-7   Mar 2011   [Refereed]
We observed the parameters of the discharge-produced plasma in cylindrical capillary. Plasma parameters of the waveguide were investigated by use of both a Normarski laser interferometer and a hydrogen plasma line spectrum. A space-averaged maximu...
Takeshi Higashiguchi, Hiromitsu Terauchi, Takamitsu Otsuka, Mami Yamaguchi, Keisuke Kikuchi, Noboru Yugami, Toyohiko Yatagai, Wataru Sasaki, Rebekah D’Arcy, Padraig Dunne, and Gerry O’Sullivan
Journal of Applied Physics   109(1) 013301-1-013301-6   Jan 2011   [Refereed]
We have characterized a discharge-produced potassium plasma extreme ultraviolet (XUV) source. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). By comparison with atomic structure...
Takamitsu Otsuka, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   97(23) 231503-1-231503-3   Dec 2010   [Refereed]
We have investigated the dependence of the spectral behavior and conversion efficiencies of rare-earth plasma extreme ultraviolet sources with peak emission at 6.7 nm on laser wavelength and the initial target density. The maximum conversion effic...
Hiromitsu Terauchi, Jin-xiang Bai, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, and Ryosuke Kodama
Journal of Physics: Conference Series   244(2) 022068-1-022068-4   Sep 2010   [Refereed]
We demonstrated the production of an optical waveguide in a capillary discharge-produced plasma. Plasma parameters of its waveguide were characterized by use of both a laser interferometer and a hydrogen plasma line spectrum. A maximum temperature...
Takamitsu Otsuka, Masashi Kudo, Shohei Sakai, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, and Ryosuke Kodama
Journal of Physics: Conference Series   244(2) 022055-1-022055-4   Sep 2010   [Refereed]
Self-compression of 20-mJ laser pulses has been demonstrated in a free-space argon-filled cell. A 130-fs pulse was compressed to less than 60 fs (full width at half maximum) with an output energy of 17 mj at an argon gas pressure of 25 kPa, corres...
Takamitsu Otsuka, Deirdre Kilbane, John White, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerry O’Sullivan
Applied Physics Letters   97(11) 111503-1-111503-3   Sep 2010   [Refereed]
We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5–6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B4C multilayer mirror. Multiply charged ions produce strong resonance emission li...
Takeshi Higashiguchi, Hiromitsu Terauchi, Noboru Yugami, Toyohiko Yatagai, Wataru Sasaki, Rebekah D'Arcy, Padraig Dunne, and Gerry O'Sullivan
Applied Physics Letters   96(13) 131505-1-131505-3   Apr 2010   [Refereed]
We have demonstrated a discharge-produced microplasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm (full width at half-maximum). The current-vol...
Takeshi Higashiguchi, Masafumi Hikida, Hiromitsu Terauchi, Jin-xiang Bai, Takashi Kikuchi, Yezheng Tao, and Noboru Yugami
Review of Scientific Instruments   81(4) 046109-1-046109-3   Apr 2010   [Refereed]
We demonstrated the production of an optical waveguide in a capillary discharge-produced plasma using a cylindrical capillary. Plasma parameters of its waveguide were characterized by use of both a Nomarski laser interferometer and a hydrogen plas...
Makoto Nakagawa, Ryosuke Kodama, Takeshi Higashiguchi, and Noboru Yugami
Physical Review E   80(2) 025402(R)-1-025402(R)-4   Aug 2009   [Refereed]
Electromagnetically induced transparency is a well-known quantum phenomena that electromagnetic wave controls the refractive index of medium. It enables us to create a passband for low-frequency electromagnetic wave in a dense plasma even if the p...
Takeshi Higashiguchi and Noboru Yugami
Journal of Applied Physics   105(9) 093301-1-093301-4   May 2009   [Refereed]
We have demonstrated the short pulse, high power microwave radiation source using an ultraviolet laser-induced sheet plasma mirror in a gas-filled x-band rectangular waveguide from the conventional microwave sources and components. A laser-induced...
Masanori Kaku, Sumihiro Suetake Yusuke Senba, Shoichi Kubodera, Masahito Katto, and Takeshi Higashiguchi
Applied Physics Letters   92(18) 181503-1-181503-3   May 2008   [Refereed]
Debris characteristics and their reduction have been investigated for a laser-produced plasma extreme ultraviolet source by using a colloidal jet target containing tin dioxide nanoparticles. The amounts of deposited debris on a witness plate were ...
Yoshifumi Ueno, Georg Soumagne, Akira Sumitani, Akira Endo, and Takeshi Higashiguchi
Applied Physics Letters   91(23) 231501-1-231501-3   Dec 2007   [Refereed]
We demonstrated enhancement of in-band conversion efficiency (CE) at 13.5nm of the extreme ultraviolet (EUV) emission from a tin (Sn) cavity target irradiated by a CO2 laser pulse. Whereas a planar Sn target produced an in-band CE of around 2%, th...
Takeshi Higashiguchi, Masanori Kaku, Masahito Katto, and Shoichi Kubodera
Applied Physics Letters   91(15) 151503-1-151503-3   Oct 2007   [Refereed]
We have demonstrated suppression of suprathermal ions from a colloidal microjet target plasma containing tin-dioxide (SnO2) nanoparticles irradiated by double laser pulses. We observed a significant decrease of the tin and oxygen ion signals in th...
Yoshifumi Ueno, Tatsuya Ariga, George Soumagne, Takeshi Higashiguchi, Shoichi Kubodera, Igor Pogorelsky, Igor Pavlishin, Daniil Stolyarov, Marcus Babzien, Karl Kusche, and Vitaly Yakimenko
Applied Physics Letters   90(19) 191503-1-191503-3   May 2007   [Refereed]
We demonstrated efficacy of a CO2-laser-produced xenon plasma in the extreme ultraviolet (EUV) spectral region at 13.5nm at variable laser pulse widths between 200ps and 25ns. The plasma target was a 30μm liquid xenon microjet. To ensure the optim...
Yoshifumi Ueno, Georg Soumagne, Akira Sumitani, Akira Endo, Takeshi Higashiguchi, and Noboru Yugami
Applied Physics Letters   92(21) 211503-1-211503-3   May 2008   [Refereed]
We demonstrated a fivefold reduction in Sn debris deposited on small Mo∕Si multilayer mirrors from a Sn planar target by applying a static magnetic field of 1T. The debris reduction is attributed to the decrease of more than three orders in the nu...

Misc

 
Takeshi Higashiguchi, Misaki Shoji, Natsumi Shinozaki, Ryo Kageyama, Shun Yamauchi, Kazuyuki Sakaue, and Toshitaka Wakayama
Reports on Topical Meeting of the Laser Society of Japan   9-14   Sep 2019   [Invited]
We developed a compact, high average power thin-disk laser for various applications. The output power was achieved to be 10 W at a repetition rate of 10 kHz. The compressed pulse duration was 80 fs [full width at half-maximum (FWHM)]. The supercon...
Ryo Kageyama, Keigo Maeda, Takuto Ogura, and Takeshi Higashiguchi
13-17   May 2019
We characterized the amplification of the multi-pass with an Yb:YAG active mirror, together with the thermal lens effects and the wavefront distortions. The output power at 1030 nm was achieved to be up to 1 W at a repetition rate of 6 kHz.
Misaki Shoji, Natsumi Shinozaki, Shun Yamauchi, Kazuyuki Sakaue, and Takeshi Higashiguchi
7-11   May 2019
We developed a high repetition rate, high average power Yb:YAG thin disk regenerative amplifier for compact extreme ultraviolet-soft x-ray sources. The average power was achieved to be 5 W at the repetition rates of 1 − 10 kHz. The shortest pulse ...
Hiromu Kawasaki, Yuta Shimada, Shinichi Namba, Akira Sasaki, Masaharu Nishikino, Tadashi Hatano, Takeo Ejima, and Takeshi Higashiguchi
1-6   May 2019
We developed the bismuth plasma-based water-window soft x-ray source. The time-integrated spectra were changed at different laser wavelengths of 1064 and 532 nm. We also identified the transitions to explain the spectral structures. The number of ...
Masahiko Ishino, Thanh-Hung Dinh, Noboru Hasegawa, Kazuyuki Sakaue, Takeshi Higashiguchi, Satoshi Ichimaru, Masatoshi Hatayama, Masakazu Washio, and Masaharu Nishikino
Proceedings of SPIE   10905 109051C-1-109051C-6   Mar 2019
The interactions of short pulse lasers with matter are interesting subjects not only in applications such as surface fabrication but also in physical phenomena for study. Optical short pulse lasers have abilities to occur the ablation phenomena ac...
Takeshi Higashiguchi, Shun Yamauchi, Natsumi Shinozaki, Takuto Ogura, Misaki Shoji, Hiromu Kawasaki, Kazuyuki Sakaue, and Taisuke Miura
IEICE technical report   118(62) 1-4   May 2018
Takeshi HIGASHIGUCHI
O plus E   39(11) 1065-1070   Nov 2017
Gerard O’Sullivan, Padraig Dunne, Deirdre Kilbane, Luning Liu, Ragava Lokasani, Elaine Long, Bowen Li, Thomas McCormack, Fergal O’Reilly, John Sheil, Emma Sokell, Chihiro Suzuki, Tao Wu, and Takeshi Higashiguchi
AIP Proceedings   1811(1) 170001-1-170001-8   Mar 2017
Sources based on laser produced plasmas of tin (Sn) are currently being developed for extreme ultraviolet lithography for semiconductor fabrication. Since they operate at short wavelength (13.5 nm) they are capable of producing features with criti...
Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, Hayato Ohashi, Nobuyuki Nakamura, Chihiro Suzuki, Hiroyuki A. Sakaue, Daiji Kato, Izumi Murakami, Fumihiro Koike, Shinsuke Fujioka, Hiroaki Nishimura, Atsushi Sunahara, Bowen Li, Padraig Dunne, and Gerry O’Sullivan
Research Report NIFS PROC   99 77-87   Feb 2016
We demonstrate EUV and soft x-ray sources in the 2 to 7 nm spectral region related to the beyond EUV (BEUV) question at 6x nm and a water window source based on laser-produced high-Z plasmas. Resonance emission from multiply charged ions merges to...
Hiroyuki Hara, Goki Arai, Thanh-Hung Dinh, Atsushi Sunahara, and Takeshi Higashiguchi
Proceedings of SPIE   9658 96581B-1-96581B-6   Jul 2015
We evaluate the EUV emission and the spatial distributions of the plasma parameters by use of the two-dimensional (2-D) radiation hydrodynamic simulation in the microplasma high-brightness EUV source. The expected EUV source size, which is attribu...
Goki Arai, Hiroyuki Hara, Thanh-Hung Dinh, Atsushi Sunahara, and Takeshi Higashiguchi
Proceedings of SPIE   9658 96581A-1-96581A-6   Jul 2015
The effect of sub-ns duration and sub-mJ energy laser pulse on 13.5 nm extreme ultraviolet (EUV) source diameter and conversion efficiency has been investigated. It was demonstrated that an in-band EUV source diameter as low as 18 μm has been prod...
Gerry O’Sullivan, Padraig Dunne, Paddy Hayden, Bowen Li, Elaine Long, Hayato Ohashi, Fergal O’Reilly, Paul Sheridan, Emma Sokell, Chihiro Suzuki, and Takeshi Higashiguchi
Reports on Topical Meeting of the Laser Society of Japan   3-7   Dec 2014   [Invited]
Takeshi HIGASHIGUCHI
O plus E   36(3) 260-265   Mar 2014
Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, and Hayato Ohashi
Reports on Topical Meeting of the Laser Society of Japan   1-6   Jan 2014
Takeshi Higashiguchi, Yuhei Suzuki, Masato Kawasaki, and Hayato Ohashi
Reports on Topical Meeting of the Laser Society of Japan   1-6   Jan 2014
Reports on Topical Meeting of the Laser Society of Japan   19-24   Oct 2013
Takeshi HIGASHIGUCHI
Reports on Topical Meeting of the Laser Society of Japan   25-30   Oct 2013
Takeshi HIGASHIGUCHI
Journal of Plasma and Fusion Research   89(10) 652-653   Oct 2013   [Invited]
Takeshi HIGASHIGUCHI
Journal of Plasma and Fusion Research   89(10) 677-678   Oct 2013   [Invited]
Hayato Ohashi, Takeshi Higashiguchi, Hiroyuki A. Sakaue, and Nobuyuki Nakamura
Reports on Topical Meeting of the Laser Society of Japan   31-35   Oct 2013
Takeshi Higashiguchi, Padraig Dunne, and Gerry O’Sullivan
Research Report NIFS PROC   93 112-119   Aug 2013
We demonstrate a table-top broadband emission water window source based on laser-produced high-Z plasmas. resonance emission from multiply charged ions merges to produce intense unresolved transition arrays (UTAs) in the 2 to 4 nm region, extendin...
Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, and Takeshi Higashiguchi
Proceedings of SPIE   8678 86780C-1-86780C-8   Dec 2012   [Invited]
In this work we present results on the influence of laser pulse duration and irradiating power density on the conversion efficiency (CE) and the ion energy of gadolinium (Gd) laser produced plasmas. Three lasers were used with 10 ns, 150 ps and 14...
Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Padraig Dunne, and Gerard D. O'Sullivan
Proceedings of SPIE   8322 83222J-1-83222J-9   Mar 2012
We demonstrate a table-top strong band emission water window source based on laser-produced high-Z plasmas. Resonance emission from multiply charged ions merges to produce intense unresolved transition arrays in the 2 to 4 nm region, extending bel...
Takamitsu Otsuka, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, and Gerard O'Sullivan
Proceedings of SPIE   8322 832214-1-832214-10   Mar 2012
We demonstrate an efficient extreme ultraviolet (EUV) source for operation at λ = 6.7 nm by optimizing the optical thickness of gadolinium (Gd) plasmas. Using low initial density Gd targets and dual laser pulse irradiation, we observed a maximum E...
A. Nishida, M. Nakata, T. Otsuka, T. Oba, F. Suzuki, T. Higashiguchi, N. Yugami, Y. Sentoku, and R. Kodama
Proceedings of The IRMMW-THz 2011   1-2   Oct 2011
F. Suzuki, S. Ono, H. Anno-Kashiwazaki, H. Terauchi, T. Higashiguchi, N. Yugami, Y. Sentoku, R. Kodama, and W. Jiang
Proceedings of The IRMMW-THz 2011   1-2   Oct 2011
Shohei Sakai, Jun Miyazawa, Takeshi Higashiguchi, Noboru Yugami, Nadezhda Bobrova, and Pavel Sasorov
Proceedings of SPIE   8140 814012-1-814012-10   Oct 2011
We have observed guiding of 1016-W/cm2 ultrashort laser pulses in a discharge-produced plasma channel in an argon-gas-filled 1-cm long alumina (Al2O3) capillary. An optimum timing of the laser pulse injection was around 150 ns for the discharge wi...
Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, Bowen Li and Gerry O’Sullivan
SPIE Newsroom      Oct 2011
A next-generation laser-produced plasma system based on rare-earth targets generates strong resonant line emissions at 6.5–6.7nm.
Akinori Nishida, Masahiro Nakata, Takafumi Oba, Takeshi Higashiguchi, Noboru Yugami, Yasuhiko Sentoku, and Ryosuke Kodama
Proceedings of SPIE   8119 81190L-1-81190L-9   Sep 2011
When plasmas are instantaneously created around an electromagnetic wave, frequency of the wave up-converted to the frequency, which depends on the plasma frequency. This phenomenon is called as the flash-ionization predicted by S. C. Wilks et al [...
Fuminori Suzuki, Hiroaki Anno-Kashiwazaki, Jun Miyazawa, Shohei Ono, Takeshi Higashiguchi, Noboru Yugami, Yasuhiko Sentoku, Ryosuke Kodama, and Patric Muggli
Proceedings of SPIE   8119 81190M-1-81190M-9   Sep 2011
Strong beams of coherent radiation are essential to induce nonlinear excitation phenomena in biology and material sciences. Optical-field-induced ionization by an ultrashort laser pulse produces ultrabroadband bursts of radiation with photon energ...
Bowen Li, Akira Endo, Takamitsu Otsuka, Colm O'Gorman, Thomas Cummins, Tony Donnelly, Deirdre Kilbane, Weihua Jiang, Takeshi Higashiguchi, Noboru Yugami, Padraig Dunne, and Gerry O'Sullivan
Proceedings of SPIE   8139 81390P-1-81390P-8   Sep 2011
An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved transition array) emission...
Takamitsu Otsuka, Deirdre Kilbane, Thomas Cummins, Colm O'Gorman, Padraig Dunne, Gerry O'Sullivan, Weihua Jiang, Akira Endo, Takeshi Higashiguchi, and Noboru Yugami
Proceedings of SPIE   8139 81390T-1-81390T-10   Sep 2011
We have demonstrated a laser-produced plasma extreme ultraviolet source operating in the 6.5-6.7 nm region based on rare-earth targets of Gd and Tb coupled with a Mo/B4C multilayer mirror. Multiply charged ions produce strong resonance emission li...
Hiromitsu Terauchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Rebekah M. D'Arcy, Padraig Dunne, and Gerard O'Sullivan
Proceedings of SPIE   8139 81390U-1-81390U-10   Sep 2011
We characterize the emission spectra of a potassium plasma and its temporal behavior at 39 nm. To understanding the potassium spectral behavior without contamination effect, we use a laser-produced plasma to control the plasma parameters by changi...
Hiromitsu Terauchi, Takeshi Higashiguchi, Noboru Yugami, and Nadezhda A. Bobrova
AIP Conference Proceedings   1299(1) 238-243   Nov 2010
We demonstrated the production of an optical waveguide in a capillary discharge‐produced plasma using a cylindrical capillary. Plasma parameters of its waveguide were characterized by use of both a Normarski laser interferometer and a hydrogen pla...
Takeshi Higashiguchi, Hiroaki Anno-Kashiwazaki, Takamitsu Otsuka, Noboru Yugami, and Ryosuke Kodama
Proceedings of The IRMMW-THz 2010   1-2   Sep 2010
Takamitsu Otsuka, Fuminori Suzuki, Masahiro Nakata, Takeshi Higashiguchi, Noboru Yugami, and Ryosuke Kodama
Proceedings of The IRMMW-THz 2010   1-2   Sep 2010
Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, and Gerry O’Sullivan
Proceedings of SPIE   7802 78020T-1-78020T-10   Aug 2010
We have reported a discharge-produced plasma extreme ultraviolet source based on a pure potassium vapor. Potassium ions produced strong broadband emission around 40 nm with a bandwidth of 8 nm [full width at halfmaximum (FWHM)]. The current-voltag...
Takeshi Higashiguchi, Hiromitsu Terauchi, Jin-xiang Bai, and Noboru Yugami
AIP Conference Proceedings   1086(1) 153-158   Jan 2009   [Refereed]
We have observed the optical guiding of a 100‐fs laser pulse with the laser intensity in the range of 1016W/cm2 using a 1.5‐cm long capillary discharge‐produced plasma channel for compact electron acceleration applications. The optical pulse propa...
Masashi Kudo, Takeshi Higashiguchi, and Noboru Yugami
AIP Conference Proceedings   1086(1) 159-164   Jan 2009   [Refereed]
Compression and splitting of the optical laser pulse due to multiple filamentation in an argon gas‐filled channel was observed. A 130–140‐fs linearly polarized pulse was successfully compressed to less than 60–80 fs with the output energy of a few...
Takeshi Higashiguchi, Hideyuki Hasegawa, Hirofumi Nishimai, Noboru Yugami, and Patric Muggli
AIP Conference Proceedings   1086(1) 701-706   Jan 2009   [Refereed]
We report the generation of radiation in the terahertz (THz) spectral region from an electrostatic field converted by a laser‐produced relativistic ionization front. The THz radiation is generated through spatiotemporal change in electron density ...
Physical Review Letters   89, 065003(1)-065003(4)    2002

Books etc

 
Extreme Ultraviolet Emission from Multi-Charged State Ions in Potassium Plasmas
Takeshi Higashiguchi, Bowen Li, Rebekah D’Arcy, Padraig Dunne, and Gerry O’Sullivan (Part:Joint Work, Short Wavelength Laboratory Sources: Principles and Practices)
Royal Society of Chemistry   2015   ISBN:978-1-84973-456-1
This chapter discusses the observation of intense XUV emission generated from a hollow cathode micro-discharge source. The emission in the 40 nm XUV spectral region has been characterized from capillary discharge and laser-produced plasmas contain...