2012年
Effect of Machining of Small Tools by Means of Focused Ion Beam
ADVANCES IN ABRASIVE TECHNOLOGY XV
- ,
- ,
- ,
- 巻
- 565
- 号
- 開始ページ
- 588
- 終了ページ
- 593
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.4028/www.scientific.net/AMR.565.588
- 出版者・発行元
- TRANS TECH PUBLICATIONS LTD
Micro holes which diameters are more than 0.1 mm are mechanically machined. However since the ideal sharp cutting edges are difficult to be made in micro drills, fine geometrical shape of micro holes is difficult to be obtained. In this study, the influence of the geometrical shape of cutting edge is experimentally discussed. In order to carry out experimental evaluation, focused ion beam is used to make the geometrical shapes of micro drills.
- リンク情報
- ID情報
-
- DOI : 10.4028/www.scientific.net/AMR.565.588
- ISSN : 1022-6680
- Web of Science ID : WOS:000317940300097