MISC

2013年

A Novel Phase-Change Memory with a Separate Heater Characterized by Constant Resistance for Multilevel Storage

ADVANCED MICRO-DEVICE ENGINEERING III
  • Rosalena Irma Alip
  • ,
  • Ryota Kobayashi
  • ,
  • Yu Long Zhang
  • ,
  • Zulfakri Mohamad
  • ,
  • You Yin
  • ,
  • Sumio Hosaka

534
開始ページ
136
終了ページ
140
記述言語
英語
掲載種別
DOI
10.4028/www.scientific.net/KEM.534.136
出版者・発行元
TRANS TECH PUBLICATIONS LTD

A novel phase-change memory structure with a separate heater was proposed for a multilevel storage. Finite element analysis was conducted to investigate the possibility of multilevel storage. 100 ns SET pulses, with an increasing amplitude from 0.5 V to 3 V, were applied for heating the phase change layer, Ge2Se2T5 (GST). From the simulation result, it was exhibited that the temperature in the GST layer increased gradually when an increasing pulse is applied to the separate heater layer (N-TiSi3). This implies that crystallization is well controlled by changing the amplitude of the applied SET pulse. The gradual increase in the temperature leads to gradual resistance drop, depending strongly on the capping material. The gradual resistance drop will allow multilevel storage for the memory device.

リンク情報
DOI
https://doi.org/10.4028/www.scientific.net/KEM.534.136
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000316642000026&DestApp=WOS_CPL
ID情報
  • DOI : 10.4028/www.scientific.net/KEM.534.136
  • ISSN : 1013-9826
  • Web of Science ID : WOS:000316642000026

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