2004年
Modification of the physical properties of chemical vapor-deposited nanostructure diamond by argon-hydrogen plasma surface treatment
PHYSICS OF THE SOLID STATE
- ,
- ,
- ,
- 巻
- 46
- 号
- 4
- 開始ページ
- 733
- 終了ページ
- 737
- 記述言語
- 英語
- 掲載種別
- 研究論文（学術雑誌）
- DOI
- 10.1134/1.1711461
- 出版者・発行元
- AMER INST PHYSICS
Nanostructure diamond (NSD) film with a hardness as high as 70 GPa and an average surface roughness of 10 nm has been synthesized by the two-step negative substrate bias method combined with post-growth Ar-H-2 plasma irradiation. The Ar-H-2 plasma irradiation has been confirmed to improve the uniformity of grain size and shape and increase the hardness of the NSD film. (C) 2004 MAIK "Nauka / Interperiodica".
- リンク情報
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- DOI
- https://doi.org/10.1134/1.1711461
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000220876600031&DestApp=WOS_CPL
- URL
- http://www.scopus.com/inward/record.url?eid=2-s2.0-2442487599&partnerID=MN8TOARS
- URL
- http://orcid.org/0000-0002-4113-5548
- ID情報
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- DOI : 10.1134/1.1711461
- ISSN : 1063-7834
- ORCIDのPut Code : 24004541
- SCOPUS ID : 2442487599
- Web of Science ID : WOS:000220876600031