論文

査読有り
1991年12月

MOCVD-GROWN SQWS ON SI WITH ALGAAS/ALGAP INTERMEDIATE LAYERS AND/OR THERMAL CYCLE ANNEALING - APPLICATION TO ROOM-TEMPERATURE CW LASERS

JOURNAL OF CRYSTAL GROWTH
  • T EGAWA
  • ,
  • Y HAYASHI
  • ,
  • T JIMBO
  • ,
  • M UMENO

115
1-4
開始ページ
524
終了ページ
528
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/0022-0248(91)90798-A
出版者・発行元
ELSEVIER SCIENCE BV

We have studied the heterointerfaces of single quantum wells (SQWs) and the characteristics of SQW lasers on Si grown with Al0.5Ga0.5As/Al0.55Ga0.45P intermediate layers (AlGaAs/AlGaP ILs) by the metalorganic chemical vapor deposition (MOCVD) technique, and compare them with those grown by the two-step growth technique. The surface morphology and the heterointerfaces of SQWs on Si substrates grown with AlGaAs/AlGaP ILs are smoother than those of the two-step-grown sample. This is caused by the two-dimensional growth of the AlGaAs/AlGaP ILs. Thermal cycle annealing is found to reduce the propagation of the dislocations into the GaAs layers on Si. Excellent lasting characteristics are obtained by the AlGaAs/AlGaP ILs, which are caused by the smooth heterointerfaces. It is shown that the AlGaAs/AlGaP ILs have played an important role in achieving smooth heterointerfaces and the excellent characteristics of the SQW laser on a Si substrate.

リンク情報
DOI
https://doi.org/10.1016/0022-0248(91)90798-A
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:A1991HF18700095&DestApp=WOS_CPL
URL
http://orcid.org/0000-0002-4113-5548
ID情報
  • DOI : 10.1016/0022-0248(91)90798-A
  • ISSN : 0022-0248
  • ORCIDのPut Code : 24004419
  • Web of Science ID : WOS:A1991HF18700095
  • ORCIDで取得されたその他外部ID : a:1:{i:0;a:1:{s:8:"other-id";s:19:"WOS:A1991HF18700095";}}

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