MISC

2003年6月

Effects of plasma in nucleation process of thin film growth

SURFACE & COATINGS TECHNOLOGY
  • N Imamura
  • ,
  • S Asatani
  • ,
  • S Hashiguchi
  • ,
  • N Terada
  • ,
  • Y Furukawa
  • ,
  • K Obara

169
開始ページ
61
終了ページ
64
記述言語
英語
掲載種別
出版者・発行元
ELSEVIER SCIENCE SA

Physical surface phenomena, which occur under pulse type plasma techniques, were investigated by using optical emission spectra from gas phase species. In order to extend the time scale, mercury was used. From the temperature dependence of emission intensity at the steady state, the condensate of mercury in plasma showed two-dimensional state above 310 K, and three-dimensional state below 310 K. In the transient state, time dependence of emission intensity showed 'overshoot' when the off-time period was longer than 64 s at 333 K, which were related to the transition from two-dimensional condensation to three-dimensional condensation in plasma. These results showed a proof that the duty cycle in the pulse plasma techniques changed the structure of the condensate. (C) 2003 Elsevier Science B.V All rights reserved.


リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000183289100015&DestApp=WOS_CPL
ID情報
  • ISSN : 0257-8972
  • Web of Science ID : WOS:000183289100015

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