論文

2017年

Hard X-ray multilayer zone plate with 25-nm outermost zone width

X-RAY MICROSCOPY CONFERENCE 2016 (XRM 2016)
  • H. Takano
  • ,
  • K. Sumida
  • ,
  • H. Hirotomo
  • ,
  • T. Koyama
  • ,
  • S. Ichimaru
  • ,
  • T. Ohchi
  • ,
  • H. Takenaka
  • ,
  • Y. Kagoshima

849
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1088/1742-6596/849/1/012052
出版者・発行元
IOP PUBLISHING LTD

We have improved the performance of a previously reported multilayer zone plate by reducing its outermost zone width, using the same multilayer materials (MoSi2 and Si) and fabrication technique. The focusing performance was evaluated at the BL24XU of SPring-8 using 20-keV X-rays. The line spread function (LSF) in the focal plane was measured using a dark-field knife-edge scan method, and the point spread function was obtained from the LSF through a tomographic reconstruction principle. The spatial resolution was estimated to be 30 nm, which is in relatively good agreement with the calculated diffraction-limited value of 25 nm, while the measured diffraction efficiency of the + 1st order was 24%.

リンク情報
DOI
https://doi.org/10.1088/1742-6596/849/1/012052
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000412800900052&DestApp=WOS_CPL
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85022023396&origin=inward
ID情報
  • DOI : 10.1088/1742-6596/849/1/012052
  • ISSN : 1742-6588
  • SCOPUS ID : 85022023396
  • Web of Science ID : WOS:000412800900052

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