2012年10月13日
Effect of pinpoint-like heating in the drying process of a polymer solution film on a substrate
e-Journal of Surface Science and Nanotechnology
- ,
- 巻
- 10
- 号
- 開始ページ
- 561
- 終了ページ
- 564
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1380/ejssnt.2012.561
We have proposed and modified a model of drying process of polymer solution coated on a at substrate for at polymer film fabrication supposing resist coating process in semiconductor engineering process and so on. And we have clarified dependence of distribution of polymer molecules on a at substrate after drying on a various parameters based on analysis of many numerical simulations of the model. Then we applied the model to thickness control of a thin film after drying through thermal and evaporative management. In this study, we tried to practice thickness control of a thin film through a simple experiment of thickness control of a thin film after drying through thermal management. And we see that heating a part of a polymer solution film on the substrate from the bottom produces locally higher thickness of a polymer thin film after drying through simple experiments. The results were qualitatively verified through numerical simulation of the model of drying process of polymer solution coated on a at substrate. © 2012 The Surface Science Society of Japan.
- ID情報
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- DOI : 10.1380/ejssnt.2012.561
- ISSN : 1348-0391
- SCOPUS ID : 84867774113