Papers

Peer-reviewed
2011

A dynamical model of drying process of a polymer solution having plural solvents and plural solutes (polymers) coated on a flat substrate for a flat and homogeneous polymer film fabrication

PHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS, VOL 8, NO 2
  • Hiroyuki Kagami
  • ,
  • Hiroshi Kubota

Volume
8
Number
2
First page
586
Last page
588
Language
English
Publishing type
Research paper (international conference proceedings)
DOI
10.1002/pssc.201000523
Publisher
WILEY-V C H VERLAG GMBH

Flat and homogeneous polymer film fabrication such as resist coating in photo lithography process is very important for minute fabrication. In many cases, a polymer solution having plural solvents and plural solutes (polymers) is generally used there. So we modify the former dynamical model of drying process of polymer solution coated on a flat substrate for flat and homogeneous polymer film fabrication so as to deal with drying process of solution having plural solutes and plural solvents. As a result, we see that when there are over two kinds of solvents and over two kinds of solutes, solute's distribution after drying obeys the mean value of over two kinds of solvents' parameters through numerical simulations of the modified model. (C) 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Link information
DOI
https://doi.org/10.1002/pssc.201000523
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000301533800112&DestApp=WOS_CPL
ID information
  • DOI : 10.1002/pssc.201000523
  • ISSN : 1862-6351
  • Web of Science ID : WOS:000301533800112

Export
BibTeX RIS