TOTSU Kentaro

J-GLOBAL         Last updated: May 29, 2019 at 19:38
 
Avatar
Name
TOTSU Kentaro
E-mail
totsutohoku.ac.jp
URL
http://db.tohoku.ac.jp/whois/e_detail/b0da8b5365160feaae2206cdaf3b23c8.html
Affiliation
Tohoku University
Section
Micro System Integration Center
Job title
Associate Professor
Degree
博士(工学)(Tohoku University)

Research Areas

 
 

Academic & Professional Experience

 
Apr 2017
 - 
Today
Deputy Director, Micro System Integration Center, Tohoku Univeristy
 
Apr 2010
 - 
Today
Associate Professor, Micro System Integration Center, Tohoku University
 
Apr 2007
 - 
Mar 2010
Assistant Professor, Office of Cooperative Research and Development, Tohoku University
 
Apr 2004
 - 
Mar 2007
Research Associate, Graduate School of Engineering, Tohoku University
 

Education

 
 
 - 
Mar 2004
Mechatronics and Precision Engineering, Graduate School, Division of Engineering, Tohoku University
 
 
 - 
Mar 1999
Mechatronics and Precision Engineering, Faculty of Engineering, Tohoku University
 

Awards & Honors

 
Oct 2015
Hermetic Seal Bonding at Low-temperature with Sub-micron Gold Particles for Wafer Level Packaging, IMAPS2015 Best of Session, IMAPS
Winner: T. Ogashiwa, K. Totsu, M. Nishizawa, H. Ishida, Y. Sasaki, M. Miyairi, H. Murai, Y. Kanehira, S. Tanaka, M. Esashi
 
Apr 2004
2003年度日本コンピュータ外科学会講演論文賞, 日本コンピュータ外科学会
Winner: 水島昌徳,芳賀洋一,戸津健太郎,江刺正喜
 

Published Papers

 
MEMS research is better together
Kentaro Totsu, Masaaki Moriyama and Masayoshi Esashi
Nature Electronics   2 134-136   Apr 2019   [Refereed]
Moriyama Masaaki, Suzuki Yukio, Totsu Kentaro, Hirano Hideki, Tanaka Shuji
IEEJ Transactions on Sensors and Micromachines   138(10) 485-494   Oct 2018   [Refereed]
Au-Au-bonding-based wafer-level vacuum packaging technology using in-plane feedthrough of thick Au signal lines was developed for RF MEMS. Compared with conventional technology based on glass frit bonding, the developed technology is advantageous ...
Isolation Characteristics of In-plane Feedthrough across Au/SiOx Seal Ring for Wafer-level RF MEMS Packaging
M. Moriyama1, Y. Suzuki, K. Totsu, H. Hirano and S, Tanaka
Proc. APCOT 2018   24-27   Jun 2018   [Refereed]
Totsu Kentaro, Moriyama Masaaki, Suzuki Yukio, Esashi Masayoshi
SENSORS AND MATERIALS   30(4) 701-711   2018   [Refereed]
Masayoshi Esashi, Kentaro Totsu
Proceedings of the International Display Workshops   2 1315-1318   Jan 2017
© 2017 Proceedings of the International Display Workshops. All rights reserved. Companies can easily access and utilize a hands-on access fabrication facility in Tohoku University for their prototyping or small-volume production. They can access a...
Toshinori Ogashiwa, Kentaro Totsu, Mitsutomo Nishizawa, Hiroyuki Ishida, Kenichi Inoue, Yuya Sasaki, Masayuki Miyairi, Shuji Tanaka and Masayoshi Esashi
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)   1304-1307   2017   [Refereed]
Kojima Akira, Ikegami Naokatsu, Miyaguchi Hiroshi, Yoshida Takashi, Suda Ryutaro, Yoshida Shinya, Muroyama Masanori, Totsu Kentaro, Esashi Masayoshi, Koshida Nobuyoshi
EMERGING PATTERNING TECHNOLOGIES   10144    2017   [Refereed]
Formation of extremely high-aspect Si sub-micron patterns with smooth wall for MEMS and X-ray devices
H. Komatsu, W. Yashiro, H. Kato, J. Kagami, K. Totsu, M. Nakao
Proc. 2017 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP)   487-490   2017   [Refereed]
Tohoku MEMS Integration and Packaging Platform in Tohoku University
Yukio Suzuki, Masaaki Moriyama, Kentaro Totsu and Shuji Tanaka
2nd French-Japanese Workshop on Micro & Nanotechnology      Nov 2016   [Refereed]
小島 明, 池上 尚克, 宮口 裕, 吉田 孝, 須田 隆太郎, 吉田 慎哉, 室山 真徳, 戸津 健太郎, 江刺 正喜, 越田 信義
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   33 1-5   Oct 2016
森山 雅昭, 鈴木 裕輝夫, 熊野 勝文, 戸津 健太郎, 平野 栄樹, 田中 秀治
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   33 1-4   Oct 2016
A. Kojima, N. Ikegami, T. Yoshida, H. Miyaguchi, M. Muroyama, S. Yoshida, K. Totsu, N. Koshida, M. Esashi
Proceedings of SPIE - The International Society for Optical Engineering   9777    Jan 2016
© 2016 COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only. Developments of a Micro Electro-Mechanical System (MEMS) electrostatic Condenser Lens Array (CLA) for a Massively Parallel Electron Beam Direct Write (MPEBDW) l...
Fabrication of Through Silicon Via with Highly Phosphorus-Doped Polycrystalline Si Plugs for Driving an Active-matrix Nanocrystalline Si Electron Emitter Array
N. Ikegami, T. Yoshida, A. Kojima, H. Miyaguchi, M. Muroyama, S. Yoshida, K. Totsu, N. Koshida, M. Esashi
Proc. 2016 IEEE 11TH ANNUAL INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)      2016   [Refereed]
戸津健太郎, 戸津健太郎
日本機械学会誌   118(1165) 726-729   Dec 2015
戸津健太郎
機械の研究   67(12) 1019-1026   Dec 2015
小島 明, 池上 尚克, 宮口 裕, 吉田 慎哉, 室山 真徳, 戸津 健太郎, 江刺 正喜, 越田 信義
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   32 1-6   Oct 2015
Hermetic Seal Bonding at Low-temperature with Sub-micron Gold Particles for Wafer Level Packaging
Toshinori Ogashiwa, Kentaro Totsu, Mitsutomo Nishizawa, Hiroyuki Ishida, Yuya Sasaki, Masayuki Miyairi, Hiroshi Murai, Yukio Kanehira, Shuji Tanaka, Masayoshi Esashi
Proc. IMAPS 48th Annual International Symposium on Microelectronics   73-78   Oct 2015   [Refereed]
Koshida Nobuyoshi, Kojima Akira, Ikegami Naokatsu, Suda Ryutaro, Yagi Mamiko, Shirakashi Junichi, Miyaguchi Hiroshi, Muroyama Masanori, Yoshida Shinya, Totsu Kentaro, Esashi Masayoshi
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS   14(3)    Jul 2015   [Refereed]
N. Koshida, A. Kojima, N. Ikegami, R. Suda, M. Yagi, J. Shirakashi, T. Yoshida, H. Miyaguchi, M. Muroyama, H. Nishino, S. Yoshida, M. Sugata, K. Totsu, M. Esashi
Proceedings of SPIE - The International Society for Optical Engineering   9423    Jan 2015
© 2015 SPIE. Making the best use of the characteristic features in nanocrystalline Si (nc-Si) ballistic hot electron source, the alternative lithographic technology is presented based on the two approaches: physical excitation in vacuum and chemic...
Miyaguchi Hiroshi, Esashi Masayoshi, Muroyama Masanori, Yoshida Shinya, Ikegami Naokatsu, Kojima Akira, Kaneko Ryosuke, Totsu Kentaro, Tanaka Shuji, Koshida Nobuyoshi
IEEJ Transactions on Sensors and Micromachines   135(10) 374-381   2015
An LSI for the Massive Parallel Electron Beam Lithography using nc-Si (Nano Cristal Silicon) has been developed. It can drive a 100×100 electron emitter as an active matrix electron emitter with an innovative aberration correction scheme, a compen...
池上尚克, 小島明, 宮口裕, 吉田孝, 吉田慎哉, 室山真徳, 菅田正徳, 越田信義, 戸津健太郎, 江刺正喜
電気学会論文誌 E   135(6) 221-229 (J-STAGE)   2015
Yukio Suzuki, Kentaro Totsu, Masaaki Moriyama, Masayoshi Esashi and Shuji Tanaka
Sensors and Actuators   231 59-64   2015   [Refereed]
鈴木 裕輝夫, 戸津 健太郎, 森山 雅昭
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]   31 1-6   Oct 2014
東北大学試作コインランドリ~MEMS の試作開発から製品化に至る一貫した支援拠点~
   May 2014
Y. Suzuki, K. Totsu, M. Moriyama, M. Esashi, S. Tanaka
Proc IEEE MEMS 2014   482-485   Jan 2014   [Refereed]
Junji Sone, Kentaro Totsu
Proceedings of the IEEE Conference on Nanotechnology   1018-1021   Dec 2013
We aim to develop a process technology for constructing a carbon MEMS/NEMS device using HOPG without a high-temperature and high-energy process. An HOPG micro-sheet was prepared by exfoliation. In addition, the cantilevers and double-clamped beams...
TOTSU Y. Suzuki, K. Totsu, H. Watanabe, M. Moriyama, M. Esashi, S. Tanaka
IEEJ Tans. Sensors and Micromachines   133(6) 223-228   Jun 2013   [Refereed]
Kentaro Totsu, Masaaki Moriyama, Yukio Suzuki, Takahito Ono, Shinya Yoshida, Masayoshi Esashi
Proceedings of the International Display Workshops   2 1405-1408   Jan 2013
© 2013 ITE and SID. We offer a hands-on-access fabrication facility for MEMS and semiconductor research and development. The facility is located at Jun-ichi Nishizawa Memorial Research Center, Tohoku University, and started in 2010. The principle ...
Tadao Matsunaga, Kentaro Totsu, Masayoshi Esashi, Yoichi Haga
Displays   34 89-94   2013   [Refereed]
K. Geshi, K. Teraoka, S. Kinoshita, M. Nakayama, Y. Imagawa, S. Nakayama, K. Hashimoto, S. Tanaka, K. Totsu, H. Takagi
IEEE International Ultrasonics Symposium, IUS   2726-2729   Dec 2012
This paper proposes use of polycrystalline spinel for the temperature compensation of RF surface acoustic wave (SAW) devices. Spinel can be bonded with LiTaO3(LT) and LiNbO3(LN) wafers by using adhesive and direct bonding techniques. A series of R...
Hands-on-access facility for MEMS and semiconductor prototyping at Tohoku University
Kentaro Totsu, Masaaki Moriyama and Masayoshi Esashi
Proc. Smart Systems Integrations 2012   18   2012
Y. Haqa, T. Matsunaga, W. Makishi, K. Totsu, M. Esashi
IDW '06 - Proceedings of the 13th International Display Workshops   2 1595-1598   Dec 2006
Endoscopes and catheters are already widely used and new more precise examinations and diagnoses are required. Small medical devices with several functions for use in the human body can be realized installing microsensors and microactuators in the...
S. Nakamura, T. Matsunaga, K. Totsu, M. Esashi, Y. Haga
IDW '06 - Proceedings of the 13th International Display Workshops   2 1553-1556   Dec 2006
Ultra-Miniature fiber optic sensor of 125 μm diameter has been developed by using MEMS fabrication techniques. The Fabry-Perot cavity is formed at the end of an optical fiber. The pressure induced deformation of the Fabry-Perot cavity diaphragm al...
Totsu Kentaro, Fujishiro Kenta, Tanaka Shuji, Esashi Masayoshi
SENSORS AND ACTUATORS A-PHYSICAL   130 387-392   Aug 2006   [Refereed]
Haga Yoichi, Matsunaga Tadao, Makishi Wataru, Totsu Kentaro, Mineta Takashi, Esashi Masayoshi
MINIMALLY INVASIVE THERAPY & ALLIED TECHNOLOGIES   15(4) 218-225   Aug 2006   [Refereed]
HAGA Yoichi, MATSUNAGA Tadao, MAKISHI Wataru, TOTSU Kentaro, MINETA Takashi, ESASHI Masayoshi
Journal of the Japan Society for Abrasive Technology   50(5) 245-248   May 2006
Totsu Kentaro, Haga Yoichi, Matsunaga Tadao, Esashi Masayoshi
FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS   529-+   2006   [Refereed]
Mourad Magdy Hussein, Totsu Kentaro, Kumagai Shinya, Samukawa Seir, Esashi Masayoshi
FUTURE MEDICAL ENGINEERING BASED ON BIONANOTECHNOLOGY, PROCEEDINGS   443-+   2006   [Refereed]
Optically Driven Microactuator for Two-Dimensional Optical Scanner
Kentaro Totsu, Hyun-Chul Kang and Masayoshi Esashi
Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology      2006   [Refereed]
Thin-Film In-Au Microjoint for MEMS Packaging
Kentaro Totsu and Masayoshi Esashi
Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology      2006   [Refereed]
Piezoelectric Resonator for Intravascular Ultrasonic Elastography
Michael Whitson, Sadao Omata, Yoshinobu Murayama, Tadao Matsunaga, Kentaro Totsu, Masayoshi Esashi and Yoichi Haga
電気学会バイオマイクロシステム研究会   63-66   2006   [Refereed]
HAGA Yoichi, AKAHORI Hiromasa, TOTSU Kentaro, WADA Hiroshi, ESASHI Masayoshi
The Review of laser engineering   33(11) 754-760   Nov 2005
K. Totsu, M. Esashi
J. Vac. Sci. Technol. B   23(4) 1487-1490   Jul 2005   [Refereed]
HIGASHITANI Asa, TOTSU Kentaro, HAGA Yoichi, ESASHI Masayoshi
電気学会研究会資料. PHS, フィジカルセンサ研究会   2005(1) 45-48   Jun 2005
K. Totsu, K. Fujishiro, S. Tanaka, M. Esashi
Proc. of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers‘05)   1441-1444   Jun 2005   [Refereed]
T. Matsunaga, W. Makishi, K. Totsu, M. Esashi, Y. Haga
Proc. of the 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers‘05)   325-328   Jun 2005   [Refereed]
K. Totsu, Y. Haga, T. Matsunaga, M. Esashi
Proc. of the 3rd Annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology   170-173   May 2005   [Refereed]
T. Matsunaga, K. Totsu, M. Esashi, Y. Haga
Proc. of the 3rd Annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology   88-91   May 2005   [Refereed]
H. Akahori, Y. Haga, T. Matsunaga, K. Totsu, H. Iseki, M. Esashi, H. Wada
Proc. of the 3rd Annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology   166-169   May 2005   [Refereed]
Y. Haga, M. Mizushima, T. Matsunaga, K. Totsu, M. Esashi
Proc. of the 3rd Annual International IEEE EMBS Special Topic Conference on Microtechnologies in Medicine and Biology   249-252   May 2005   [Refereed]
Y. Haga, W. Makishi, K. Iwami, K. Totsu, K. Nakamura, M. Esashi
Sensors and Actuators A   119 316-322   Apr 2005   [Refereed]
M. H. Mourad, K. Totsu, S. Kumagai, S. Samukawa, M. Esashi
Jpn. J. Appl. Phys.   44(3) 1414-1418   Mar 2005   [Refereed]
K. Totsu, Y. Haga, M. Esashi
J. Micromech. Microeng.   15 71-75   Jan 2005   [Refereed]
Photolithography on Cylindrical Substrate for Realization of High-Functional Tube-Shaped Micro-Tools
S. Goto, T. Matsunaga, K. Totsu, W. Makishi, M. Esashi and Y. Haga
Proceedings of the 22nd Sensor Symposium   112-115   2005
Ultra-Miniature Fiber-Optic Medical Pressure Sensor System Using White Light Interferometry
K. Totsu, Y. Haga, M.M. Lwin, M. Esashi
Proc. of the Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT) 2004   357-361   Jul 2004   [Refereed]
Active Bending Long Intestinal Tube Using Shape Memory Alloy
M. Mizushima, Y. Haga, K. Totsu, M. Esashi
Proceedings of the Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT) 2004   893-896   Jul 2004   [Refereed]
Narrow Interval 2-D Pin Display Using SMA Coil Actuator for Blind Person
T. Matsunaga, Y. Haga, M. Mizushima, K. Totsu, M. Esashi
Proc. of the Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT) 2004   306-309   Jul 2004   [Refereed]
Piezoelectric 2D Microscanner for Intracorporeal Laser Treatment
H. Akahori, Y. Haga, K. Totsu, M. Esashi, H. Wada
Proc. of the Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT) 2004   211-214   Jul 2004   [Refereed]
Active Catheter Using Shape Memory Alloy for Treatment of Intestinal Obstruction
M. Mizushima, Y. Haga, K. Totsu, M. Esashi
J. Japan Society of Computer Aided Surgery   6(1) 23-29   Jun 2004   [Refereed]
K. Totsu, Y. Haga, M. Esashi
Sensors and Actuators A   111 304-309   Mar 2004   [Refereed]
Matsunaga Tadao, Mizushima Masanori, Totsu Kentaro, Haga Yoichi, Esashi Masayoshi
The Proceedings of the Bioengineering Conference Annual Meeting of BED/JSME   2004(0) 91-92   2004
MIZUSHIMA M., HAGA Y., TOTSU K., ESASHI M.
Journal of Japan Society of Computer Aided Surgery : J.JSCAS   5(3) 265-266   Dec 2003
K. Totsu, Y. Haga, M. Esashi
Proc. of the 12th IEEE Int. Conf. on Solid State Sensors, Actuators and Microsystems (Transducers’03)   931-934   Jul 2003   [Refereed]
Ultra Miniature Fiber-Optic Pressure Sensor Using White Light Interferometer
Kentaro Totsu, Yoichi Haga, Masayoshi Esashi
第31回人工心臓と補助循環懇話会抄録集   95   2003   [Refereed]
Development of Ultra Miniature Fiber-optic Blood Pressure Sensor System
K. Totsu, Y. Haga, P.N. Minh, M. Esashi
Proc. of The 19th Sensor Symposium   429-432   May 2002   [Refereed]
Development of Active Catheter, Active Guide Wire and Micro Sensor Systems
Yoichi Haga, Takashi Mineta, Kentaro Totsu, Wataru Makishi and Masayoshi Esashi
Interventional Neuroradiology   7 125-130   2001   [Refereed]
Magnetic Sensor System for Detecting Position and Orientation of a Catheter Tip
K. Totsu, Y. Haga, M. Esashi
Trans. IEE Japan   120-E(5) 211-218   May 2000   [Refereed]
Sensor Development for Occlusal Force and Relative Position
K. Nozaki, K. Totsu, S. Wang, K. Kuroe, T. Sata, M. Esashi
Trans. IEE Japan   120-E(4) 150-155   Apr 2000   [Refereed]
シリコンコンデンサマイクロフォンによる直接周波数変調を用いたFMワイヤレスマイク
藤原類,戸津健太郎,江刺正喜
第17回センサ・マイクロマシンと応用システムシンポジウム講演概要集   105   2000   [Refereed]

Misc

 
田畑 修, 戸津 健太郎
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society   121(5) 289-290   May 2001

Books etc

 
経済産業研究所 経済政策レビュー 8 産学連携
原山優子,和賀三和子,児玉俊洋,戸津健太郎 (Part:Editor, 第5章 マイクロ・ナノ・システム・テクノロジー分野における産学連携-現状と課題 pp.126-132,149-152)
東洋経済新報社   Apr 2003   

Conference Activities & Talks

 
UV-imprint lithography based on UV-curable PDMS
Masashi Nakao, Kentaro Totsu, Yoshimasa Sugimoto
The 15th Chitose International Forum on Photonics Science & Technology   Oct 2014   
MEMS Commercialization in Japan
TOTSU Kentaro
MANCEF’s COMET in Tokyo   2013   
Hands-on Access Fabrication Facility
Kentaro Totsu, Kazuhiro Miwa, Takahito Ono,
International Symposium on Integrated Microsystems (ISIM2011)   10 Feb 2011   
MEMS Hands-on access facility at Tohoku University
TOTSU Kentaro
Workshop on Innovation and Commercialization of Micro & Nanotechnology (ICMAN2011)   2011   
MEMS Innovation at Tohoku University
TOTSU Kentaro
Japanese University Network in the Bay Area (JUNBA) Technology Fair 2008   2008   
Innovative MEMS Research and Development at Tohoku University
TOTSU Kentaro
Nanoforum 2008   2008   
MEMS Innovation in Sendai
TOTSU Kentaro
The 2nd International Workshop on Innovation ICMAN2008   2008   
Cooperative Education, Research and Development in Sendai
TOTSU Kentaro
DAAD Seminar Series   2007   
MEMS Industrialization in Sendai
TOTSU Kentaro
The 1st International Workshop on Innovation ICMAN2007   2007   

Research Grants & Projects

 
Development of In Vivo Local Measurement and Treatment System
Ordinary Research
Project Year: Apr 2004 - Today