ITO Takashi

J-GLOBAL         Last updated: May 13, 2016 at 17:59
 
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Name
ITO Takashi

Research Areas

 
 

Academic & Professional Experience

 
 
   
 
Professor,AIST, Tokyo Institute of Technology Solution Science Research Laboratory
 
2003
 - 
2004
Chief Scientist and Diector of Akiruno Technology Center, Fujitsu Ltd.
 
2001
 - 
2003
General Manager, Silicon Technology Laboratoy, Fujitsu Laboratories Ltd.
 

Education

 
 
 - 
1974
Electronics Engineering, Graduate School, Division of Engineering, Tokyo Institute of Technology
 
 
 - 
1971
Electronics Engineering, Graduate School, Division of Engineering, Tokyo Institute of Technology
 
 
 - 
1969
Faculty of Science and Engineering, Tokyo Institute of Technology
 

Committee Memberships

 
1993
 - 
1994
The Institute of Electronics, Information and Communication Engineers  
 
1995
 - 
1996
The Institute of Electronics, Information and Communication Engineers  Board member
 
1998
   
 
The Electrochemical Society, Inc.  Secretary of Japan Section
 

Books etc

 
Contamination Control and Defect Reduction in Semiconductor Manufacturing
Electrochemical Society, Inc.   1994   
Ultra Clean Surface Processing of Silicon Wafers
1998   
Nanolithography; Length Limitation of Lithography
Encyclopedia of Nanoscience and Nanotechnology   2004   

Works

 
Applications of high-density ozon gas
2007 - 2008

Research Grants & Projects

 
High-Functional Ubiquitous Chips using TFTs
Project Year: 2004   
Intelligent 3D-LSI with multi-layer interconnections
Project Year: 2004   
Surface control technology of Si for high-performance CMOS
Project Year: 2004