MISC

2011年

マイクロ金型を用いたキャスティング法による低密度波長分割多重用アレイ導波路回折格子に関する研究(第二報)-アレイ導波路回折格子製作方法の改良および分波特性評価-

精密工学会誌
  • 岡田和志
  • ,
  • 渡邉英応
  • ,
  • 大平文和
  • ,
  • 寺尾京平
  • ,
  • 三原豊
  • ,
  • 鈴木孝明
  • ,
  • 小川一文

77
2
開始ページ
213
終了ページ
217
記述言語
日本語
掲載種別
DOI
10.2493/jjspe.77.213
出版者・発行元
公益社団法人 精密工学会

The fabrication process of Arrayed Waveguide Grating (AWG) for the Coarse Wavelength Division Multiplexing (CWDM) by the casting method using the micro die is proposed, and the optical characteristics are evaluated for the fabricated device. In the 1st report, the fabrication process of AWG by the casting method was proposed. To fabricate the micro die, the electro-plating method after fabricating the mother shape using SU-8 was used. In this paper, the improved process of filling the core material to the core channel of the formed under clad using the spin-coater is examined. The condition of filling the core material is decided by optimizing the condition of the spin coating. The AWG is realized by the proposed method, and then the optical characteristics are evaluated. As the result, the wavelength demultiplexing are successfully confirmed.

リンク情報
DOI
https://doi.org/10.2493/jjspe.77.213
CiNii Articles
http://ci.nii.ac.jp/naid/130001002629
CiNii Books
http://ci.nii.ac.jp/ncid/AN1003250X
URL
http://id.ndl.go.jp/bib/11002981
URL
https://jlc.jst.go.jp/DN/JALC/00363732761?from=CiNii
ID情報
  • DOI : 10.2493/jjspe.77.213
  • ISSN : 0912-0289
  • ISSN : 1882-675X
  • CiNii Articles ID : 130001002629
  • CiNii Books ID : AN1003250X

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