小島勇夫 (Isao Kojima) - マイポータル

基本情報

所属: 独立行政法人産業技術総合研究所計測標準研究部門

J-GLOBAL ID: 200901067797246200
researchmap会員ID: 5000086787

外部リンク: http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=I23520214

MISC

Interfacial intermixing of TiN/Si3N4 super-hard multilayer films studied by fluorescence x-ray absorption fine structure

ZY Pan, ZH Sun, Z Xie, JH Xu, Kojima, I, SQ Wei

JOURNAL OF PHYSICS D-APPLIED PHYSICS 39(13) 2796-2802 2006年7月
Comparative study of the interfacial characteristics of sputter-deposited HfO2 on native SiO2/Si (100) using in situ XPS, AES and GIXR

RQ Tan, Y Azuma, Kojima, I

SURFACE AND INTERFACE ANALYSIS 38(4) 784-788 2006年4月
Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM

Misumi, I, S Gonda, T Kurosawa, Y Azuma, T Fujimoto, Kojima, I, T Sakurai, T Ohmi, K Takamasu

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 30(1) 13-22 2006年1月
Cleaning method for thickness metrology of SiO2 thin films on Si substrates by heating in atmosphere

Y Azuma, T Fujimoto, Kojima, I

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 44(11) 8256-8258 2005年11月
Effect of Bi surfactant on the heteroepitaxial growth in Fe/Cr(100) multilayers

M Kamiko, H Mizuno, H Chihaya, JH Xu, Kojima, I, R Yamamoto

SOLID STATE COMMUNICATIONS 134(12) 803-808 2005年6月
Physical structures of SiO2 ultrathin films probed by grazing incidence x-ray reflectivity

Y Azuma, JW Fan, Kojima, I, S Wei

JOURNAL OF APPLIED PHYSICS 97(12) 123522-23526 2005年6月
Influence of thickness of Hf buffer layer on the interfacial structures of sputtered HfO2 on SiO2/Si

RQ Tan, Y Azuma, Kojima, I

APPLIED SURFACE SCIENCE 244(1-4) 21-25 2005年5月
X-ray photoelectron spectroscopic analysis of HfO2/Hf/SiO2/Si structure

RQ Tan, Y Azuma, Kojima, I

APPLIED SURFACE SCIENCE 241(1-2) 135-140 2005年2月
Critical review of the current status of thickness measurements for ultrathin SiO2 on Si Part V. Results of a CCQM pilot study

MP Seah, SJ Spencer, F Bensebaa, Vickridge, I, H Danzebrink, M Krumrey, T Gross, W Oesterle, E Wendler, B Rheinlander …

SURFACE AND INTERFACE ANALYSIS 36(9) 1269-1303 2004年9月
Preparation of ultrathin HfO2 films and comparison of HfO2/SiO2/Si interfacial structures

RQ Tan, Y Azuma, T Fujimoto, JW Fan, Kojima, I

SURFACE AND INTERFACE ANALYSIS 36(8) 1007-1010 2004年8月
Bi-enhanced Heteroepitaxial Layered Growth of Cr on Fe(100)-c(2×2)O Reconstruction Surfaces

KAMIKO M, MIZUNO H, CHIHAYA H, XU J, KOJIMA I, YAMAMOTO R

JAPANESE JOURNAL OF APPLIED PHYSICS 43(6A) 3561-3565 2004年6月
Bi induced layer-by-layer growth in the homoepitaxial growth of Fe on Fe(100)-c(2×2)O reconstruction surface

JOURNAL OF CRYSTAL GROWTH 263(1-4) 363-371 2004年3月
Nanoscale structural change in a sputter-deposited SiO2/a-Si/SiO2 sandwich

BQ Li, WT Xu, T Fujimoto, Kojima, I

JOURNAL OF APPLIED PHYSICS 95(3) 1600-1602 2004年2月
R & D of thin film certified referenced materials

SMAM-1 proceeding 165-168 2004年
What happens in the annealing of carbon nitride thin films?

WT Xu, T Fujimoto, L Wang, T Ohchi, Kojima, I

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 22(1) 6-11 2004年1月
Suppression of interfacial diffusion by a predeposited Hf metal layer on SiO2/Si

RQ Tan, Y Azuma, Kojima, I

APPLIED SURFACE SCIENCE 222(1-4) 346-350 2004年1月
Carbon nitride thin films prepared by radio-frequency magnetron sputtering combined with a nitrogen radical beam source

WT Xu, L Wang, Kojima, I

JOURNAL OF APPLIED PHYSICS 94(11) 7345-7350 2003年12月
Structure, hardness, and elastic modulus of Pd/Ti nanostructured multilayer films

JH Xu, M Kamiko, H Sawada, YM Zhou, R Yamamoto, LH Yu, Kojima, I

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 21(6) 2584-2589 2003年11月
Surface evolution of nanostructured CrN and Si3N4 films

JH Xu, LH Yu, Kojima, I

JOURNAL OF APPLIED PHYSICS 94(10) 6827-6836 2003年11月
FTIR-ATR evaluation of organic contaminant cleaning methods for SiO2 surfaces

A Shinozaki, K Arima, M Morita, Kojima, I, Y Azuma

ANALYTICAL SCIENCES 19(11) 1557-1559 2003年11月

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