MASUDA Atsushi

J-GLOBAL         Last updated: Jan 4, 2006 at 00:00
 
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Name
MASUDA Atsushi
Affiliation
National Institute of Advanced Industrial Science and Technology
Degree
Doctor of Engineering(Kanazawa University)

Research Areas

 
 

Academic & Professional Experience

 
1994
 - 
1996
Research Fellow of the Japan Society for
 
 
   
 
      the Promotion of Science
 
1996
   
 
- Research Associate, School of Materials Science,
 
 
   
 
Japan Advanced Institute of Science and Technology
 

Education

 
 
 - 
1996
Graduate School, Division of National Science and Technology, Kanazawa University
 
 
 - 
1990
Faculty of Economics, Kyoto University
 

Misc

 
Relationship between photodarkening and light-induced ESR in amorphous Ge-S films alloyed with lead
Japanese Journal of Applied Physics   30(6B) L1075-L1078   1991
Light-induced ESR and disappearance of photodarkening in amorphous Ge-S films alloyed with lead
Journal of Non-Crystalline Solids   137-138 985-988   1991
Spectroscopic study on N2O-plasma oxidation of hydrogenated amorphous silicon and behavior of nitrogen
Japanese Journal of Applied Physics   32(6A) 2794-2802   1993
Japanese Journal of Applied Physics   33(6A) L793-L796   1994

Books etc

 
X-ray photoelectron spectroscopy of GaN layer formed on GaAs by NH3-plasma nitridation and successive excimer-laser irradiation
Institute of Physics Conference Series(Institute of Physics Publishing, Bristol)   1996   
Novel surface cleaning of GaAs and formation of high quality SiNx films by cat-CVD method
Institute of Physics Conference Series(Institute of Physics Publishing, Bristol)   1997   
Low temperature nitridation of Si surface using gas-decomposition reaction in cat-CVD method
Proceedings of the International Symposium on Thin Film Materials, Precesses, Reliability, and Applications(The Electrochemical Society, Inc. , Pennington)   1998   
Cat-CVD process and its application to preparation of Si-based thin films
Amorphous and Heterogeneous Silicon Thin Films : Fundamentals to Devices-1999, Materials Research Society Symposium Proceedings   1999   
Effects of active ammonia gas cracked in catalytic-CVD on PZT ferroelectivic capacitors
Ferroelectric Thin Films (]G0008[), Matevials Research Society Symposium Proceedings   2000   

Works

 
Cat-CVD fabrication processes for semiconductor devices
1998 - 2001
Cat-CVD fabrication techniques for solar cells
2001
Novel fabrication processes of thin-film transistors for large-area liquid-crystal displays
2001

Research Grants & Projects

 
Integration Technique of Oxide Ferroelectric Thin Films and Semiconductors
Mechanism of Pulsed Laser Ablation
Characterization of Amorphous and Polycrystalline Silicon Films Prepared by Catalytic Chemical Vapor Deposition
Thin-film formation by catalytic chemical vapor deposition
Thin film silicon solar cells