1996年10月
Ambient-pressure influence on droplet formation and thickness distribution in pulsed laser ablation
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY
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- 巻
- 41
- 号
- 1
- 開始ページ
- 161
- 終了ページ
- 165
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1016/S0921-5107(96)01645-5
- 出版者・発行元
- ELSEVIER SCIENCE SA LAUSANNE
Droplet formation and inhomogeneous thickness distribution, both of which are severe drawbacks in the films deposited by pulsed laser ablation, were investigated in detail for metal-oxide films and Si films prepared in various ambient pressures. It was found that the shock front observed for the high-pressure ambient is one of the important factors of the surface roughening with clustered fragments, the shape of droplets and the increase in the thickness distribution. Oxidation of ejected materials from non-oxide target in the ambient containing a small amount of O-2 is also enhanced with the formation of the shock front by adding the high-pressure He. The ambient pressure forming no shock front is suitable for preventing the surface roughening and the severe thickness distribution.
- リンク情報
- ID情報
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- DOI : 10.1016/S0921-5107(96)01645-5
- ISSN : 0921-5107
- CiNii Articles ID : 80009287569
- Web of Science ID : WOS:A1996VT58100034