菅原健太郎 (Kentaro Sugawara) - マイポータル

基本情報

所属: 国立研究開発法人産業技術総合研究所工学計測標準研究部門幾何標準研究グループ

J-GLOBAL ID: 200901009174245369
researchmap会員ID: 5000087114

外部リンク: http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=K84079983

研究分野

ものづくり技術（機械・電気電子・化学工学） / 計測工学 /

論文

Extension of the probe-tip error evaluation for areal surface roughness measurements using metrological AFM

Ichiko Misumi, Ryosuke Kizu, Kentaro Sugawara, Akiko Hirai, Satoshi Gonda

Measurement: Sensors 18 100092-100092 2021年12月
A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope

Ichiko Misumi, Ryosuke Kizu, Kentaro Sugawara, Akiko Hirai, Satoshi Gonda

MEASUREMENT SCIENCE AND TECHNOLOGY 31(9) 2020年9月
Interlaboratory comparison of nanoparticle size measurements between NMIJ and NIST using two different types of dynamic light scattering instruments

Kayori Takahashi, John A Kramar, Natalia Farkas, Keiji Takahata, Ichiko Misumi, Kentaro Sugawara, Satoshi Gonda, Kensei Ehara

Metrologia 56(5) 055002(7pp) 2019年8月査読有り
Extension of the range of profile surface roughness measurements using metrological atomic force microscope

Ichiko Misumi, Kentaro Sugawara, Ryosuke Kizu, Akiko Hirai, Satoshi Gonda

Precision Engineering 2019年3月査読有り
Nanoparticle Characterization-Supplementary Comparison on Nanoparticle Size

Jämting, A.K., Lin, H.-L., Fu, W.-E., Weng, H.-F., Misumi, I., Sugawara, K., Gonda, S., Takahashi, K., Takahata, K., Ehara, K. …

Metrologia 56(1A) 2019年
Size measurements of standard nanoparticles using metrological atomic force microscope and evaluation of their uncertainties

Ichiko Misumi, Kentaro Sugawara, Keiji Takahata, Kayori Takahashi, Kensei Ehara

Precision Engineering 51 691-701 2018年1月1日査読有り
Profile surface roughness measurement using metrological atomic force microscope and uncertainty evaluation

Ichiko Misumi, Kazuya Naoi, Kentaro Sugawara, Satoshi Gonda

MEASUREMENT 73 295-303 2015年9月査読有り
Recent Activity of International Comparison for Nanoparticle Size Measurement

Kayori Takahashi, Keiji Takahata, Ichiko Misumi, Kentaro Sugawara, Satoshi Gonda, Kensei Ehara

INTERNATIONAL CONFERENCE ON OPTICAL PARTICLE CHARACTERIZATION (OPC 2014) 9232 2014年査読有り
Pixel length calibration using a pattern matching method for secondary-electron images

Kentaro Sugawara, Ichiko Misumi, Satoshi Gonda

INTERNATIONAL CONFERENCE ON OPTICS IN PRECISION ENGINEERING AND NANOTECHNOLOGY (ICOPEN2013) 8769 2013年査読有り
Extension of the gravity center method for diameter calibration of polystyrene standard particles with metrological AFM

Ichiko Misumi, Keiji Takahata, Kentaro Sugawara, Satoshi Gonda, Kensei Ehara

SCANNING MICROSCOPIES 2012: ADVANCED MICROSCOPY TECHNOLOGIES FOR DEFENSE, HOMELAND SECURITY, FORENSIC, LIFE, ENVIRONMENTAL, AND INDUSTRIAL SCIENCES 8378 2012年査読有り
Development of photomask linewidth measurement and calibration using AFM and SEM in NMIJ

Kentaro Sugawara, Osamu Sato, Ichiko Misumi, Satoshi Gonda, Mingzi Lu

SCANNING MICROSCOPIES 2011: ADVANCED MICROSCOPY TECHNOLOGIES FOR DEFENSE, HOMELAND SECURITY, FORENSIC, LIFE, ENVIRONMENTAL, AND INDUSTRIAL SCIENCES 8036 2011年査読有り
Bilateral comparison of 25 nm pitch nanometric lateral scales for metrological scanning probe microscopes

Ichiko Misumi, Gaoliang Dai, Mingzi Lu, Osamu Sato, Kentaro Sugawara, Satoshi Gonda, Toshiyuki Takatsuji, Hans-Ulrich Danzebrink, Ludger Koenders

MEASUREMENT SCIENCE AND TECHNOLOGY 21(3) 2010年3月査読有り
Nanometric lateral scale development with Si/SiO2 multilayer thin-film structures and improvement of uncertainty evaluation using analysis of variance

Ichiko Misumi, Mingzi Lu, Hideyuki Tanaka, Kentaro Sugawara, Satoshi Gonda, Tomizo Kurosawa

MEASUREMENT SCIENCE AND TECHNOLOGY 19(4) 2008年4月査読有り
Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes

Sugawara K, Sato O, Yoshizaki K, Misumi I, Gonda S

Measurement Technology and Intelligent Instruments Viii 381-382 605-606 2008年査読有り
Application of a GaAs/InGaP superlattice in nanometric lateral scales

Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Toshiyuki Takatsuji, Yasushi Azuma, Toshiyuki Fujimoto, Tomizo Kurosawa

MEASUREMENT SCIENCE AND TECHNOLOGY 18(9) 2743-2749 2007年9月査読有り
Effects of angle misalignments on pitch measurements of two-dimensional gratings using an AFM

Kentaro Sugawara, Osamu Sato, Kazunori Yoshizaki, Ichiko Misumi, Satoshi Gonda, Toshiyuki Takatsuji, Jun-Ichiro Kitta

Journal of the Chinese Society of Mechanical Engineers, Transactions of the Chinese Institute of Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao 27(5) 531-534 2006年10月
Design and fabrication of nanometric lateral scale consisting of GAAS/INGAP superlattice

Ichiko Misumi, Satoshi Gonda, Osamu Sato, Kentaro Sugawara, Kazunori Yoshizaki, Qiangxian Huang, Tomizo Kurosawa, Toshiyuki Takatsuji

18th IMEKO World Congress 2006: Metrology for a Sustainable Development 2 1531-1534 2006年

MISC

ナノ領域トレーサビリティのためのナノスケール標準

大澤尊光, 権太聡, 三隅伊知子, 佐藤理, 菅原健太郎

自動車技術 63(5) 97-102 2009年5月1日
ナノスケールものづくりのためのナノスケール標準

大澤尊光, 権太聡, 三隅伊知子, 佐藤理, 菅原健太郎

計測と制御 = Journal of the Society of Instrument and Control Engineers 47(9) 757-762 2008年9月10日
測長原子間力顕微鏡を用いた段差校正 (特集段差計測)

三隅伊知子, 佐藤理, 菅原健太郎

計測標準と計量管理 57(1) 15-21 2007年5月20日
Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers

I. Misumi, S. Gonda, O. Sato, K. Sugawara, K. Yoshizaki, T. Kurosawa, T. Takatsuji

MEASUREMENT SCIENCE AND TECHNOLOGY 17(7) 2041-2047 2006年7月
Nanoscale phase changes in crystalline Ge2Sb2Te5 films using scanning probe microscopes

H Satoh, K Sugawara, K Tanaka

JOURNAL OF APPLIED PHYSICS 99(2) 024306-1-024306-7 2006年1月

菅原健太郎

基本情報

研究分野

論文

MISC

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