小林 健

Wafer scale lead zirconate titanate film preparation by sol-gel method using stress balance layer 

THIN SOLID FILMS 515(4) 1506-1510 2006年12月  

The effect of heat-treatment conditions on mechanical and morphological properties of a FIB-milled glassy carbon mold with micro patterns 

JOURNAL OF MICROMECHANICS AND MICROENGINEERING 16(7) 1277-1284 2006年7月  

Fabrication and performance of a flat piezoelectric cantilever obtained using a sol-gel derived PZT thick film deposited on a SOI wafer 

SMART MATERIALS AND STRUCTURES 15(1) S137-S140 2006年2月  

Photovoltaic effect of ferroelectric PLZT in a layered and preferentially oriented film 

MICROELECTRONICS: DESIGN, TECHNOLOGY, AND PACKAGING II 6035 190-197 2006年  

Fabrication of flat PZT cantilevers through MEMS technologies and application to optical MEMS 

Key Engineering Materials 301 37-40 2006年  

Photovoltaic properties of (Pb,La)(Zr,Ti)O-3 films with different crystallographic orientations 

APPLIED PHYSICS LETTERS 87(22) 222903-1-222903-3 2005年11月  

Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition 

THIN SOLID FILMS 489(1-2) 74-78 2005年10月  

Fabrication of optical micro scanner driven by PZT actuators 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 44(9B) 7078-7082 2005年9月  

Development of a novel self-sensitive atomic force microscope for nondestructive measurement of micro vertical surfaces 

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 10(5) 423-425 2004年8月  

Sol-gel deposition of PZT thick film on Pt/Ti/SOI substrate and application to 2D micro scanning mirror 

DEVICE AND PROCESS TECHNOLOGIES FOR MEMS, MICROELECTRONICS, AND PHOTONICS III 5276 524-531 2004年