論文

査読有り
2016年11月

Very low-noise large-area calorimeter based on bimetallic micromechanical transduction: toward sub-nanowatt resolution in air at room temperature

APPLIED PHYSICS EXPRESS
  • Kuniaki Amemiya
  • ,
  • Daiji Fukuda
  • ,
  • Tatsuya Zama

9
11
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.7567/APEX.9.117201
出版者・発行元
IOP PUBLISHING LTD

We demonstrated a very low-noise, large-area calorimeter based on a micromechanical heat-flow sensor. The input heat flow is transduced to the bimetallic deformation of the sensor, which is observed using a high-resolution fiber optic interferometer. The characteristics of 5-mm-square Si-Al bimetallic micromechanical sensors fabricated using silicon-on-insulator micromachining processes were investigated. We experimentally achieved a heat-detection noise of 12nW, which is comparable to the best performance of thermopiles. The developed sensor is free of Johnson noise, which constrains the signal-to-noise ratio. In principle, this technique can provide a sub-nanowatt resolution even in air at room temperature. (C) 2016 The Japan Society of Applied Physics

リンク情報
DOI
https://doi.org/10.7567/APEX.9.117201
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000387048600001&DestApp=WOS_CPL
URL
http://orcid.org/0000-0003-0555-4320
ID情報
  • DOI : 10.7567/APEX.9.117201
  • ISSN : 1882-0778
  • eISSN : 1882-0786
  • ORCIDのPut Code : 45882025
  • Web of Science ID : WOS:000387048600001

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