2016年11月
Very low-noise large-area calorimeter based on bimetallic micromechanical transduction: toward sub-nanowatt resolution in air at room temperature
APPLIED PHYSICS EXPRESS
- ,
- ,
- 巻
- 9
- 号
- 11
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.7567/APEX.9.117201
- 出版者・発行元
- IOP PUBLISHING LTD
We demonstrated a very low-noise, large-area calorimeter based on a micromechanical heat-flow sensor. The input heat flow is transduced to the bimetallic deformation of the sensor, which is observed using a high-resolution fiber optic interferometer. The characteristics of 5-mm-square Si-Al bimetallic micromechanical sensors fabricated using silicon-on-insulator micromachining processes were investigated. We experimentally achieved a heat-detection noise of 12nW, which is comparable to the best performance of thermopiles. The developed sensor is free of Johnson noise, which constrains the signal-to-noise ratio. In principle, this technique can provide a sub-nanowatt resolution even in air at room temperature. (C) 2016 The Japan Society of Applied Physics
- リンク情報
- ID情報
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- DOI : 10.7567/APEX.9.117201
- ISSN : 1882-0778
- eISSN : 1882-0786
- ORCIDのPut Code : 45882025
- Web of Science ID : WOS:000387048600001