藤森直治 (Naoji Fujimori) - マイポータル

基本情報

所属: 独立行政法人産業技術総合研究所ダイヤモンド研究センター

J-GLOBAL ID: 200901059769918496
researchmap会員ID: 5000087329

外部リンク: http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=N42305311

研究キーワード

ダイヤモンド気相合成半導体デバイスセンサー表面修飾

MISC

Qualitative correspondences of experimentally obtained growth rates and morphology of single-crystal diamond with numerical predictions of plasma and gas dynamics in microwave discharges for various substrate holder shapes

Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Yousuke Soda, Yuji Horino, Shin-ichi Shikata, Naoji Fujimori

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 45(10B) 8177-8182 2006年10月
Numerical analysis of power absorption and gas pressure dependence of microwave plasma using a tractable plasma description

Hideaki Yamada, Akiyoshi Chayahara, Yoshiaki Mokuno, Yousuke Soda, Yuji Horino, Naoji Fujimori

DIAMOND AND RELATED MATERIALS 15(9) 1395-1399 2006年9月
Atomic scale interactions between hydrocarbon radicals and diamond (100) surfaces”, Diamond and Related Materials, submitted (2005).

YAMADA Hideaki, CHAYAHARA Akiyoshi, MOKUNO Yoshiaki, HORINO Yuji, FUJIMORI Naoji

DIAMOND AND RELATED MATERIALS 15(4-8) 522-525 2006年4月
High rate homoepitaxial growth of diamond by microwave plasma CVD with nitrogen addition

Y. Mokuno, A. Chayahara, Y. Soda, H. Yamada, Y. Horino, N. Fujimori

DIAMOND AND RELATED MATERIALS 15(4-8) 455-459 2006年4月
High-rate growth of large diamonds by microwave plasma chemical vapor deposition with newly designed substrate holders

Y Horino, A Chayahara, Y Mokuno, H Yamada, N Fujimori

NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 16(2) 63-69 2006年
Smooth surface dry etching of diamond by very high frequency inductively coupled plasma

H Yoshikawa, S Shikata, N Fujimori, N Sato, T Ikehata

NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY 16(2) 97-106 2006年
Synthesizing single-crystal diamond by repetition of high rate homoepitaxial growth by microwave plasma CVD

Y Mokuno, A Chayahara, Y Soda, Y Horino, N Fujimori

DIAMOND AND RELATED MATERIALS 14(11-12) 1743-1746 2005年11月
Self-aligned fabrication of single crystal diamond gated field emitter array

T Yamada, PR Vinod, DS Hwang, H Yoshikawa, S Shikata, N Fujimori

DIAMOND AND RELATED MATERIALS 14(11-12) 2047-2050 2005年11月
Modeling and numerical analyses of microwave plasmas for optimizations of a reactor design and its operating conditions

H Yamada, A Chayahara, Y Mokuno, Y Soda, Y Horino, N Fujimori

DIAMOND AND RELATED MATERIALS 14(11-12) 1776-1779 2005年11月
Fabrication of single crystalline diamond triode electron emitter

PR Vinod, T Yamada, DS Hwang, N Fujimori

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS 44(16-19) L497-L499 2005年
FIeld emission mechanism of oxidized highly phosphorus-doped homoepitaxial diamond (111)

Applied Physics Letters 87(23) 234107- 2005年
Characterization of field emission from nano-scaled diamond tip arrays

Jpn. J. Appl. Phys. 44(12-15) L385-L387 2005年
The effect of nitrogen addition during high-rate homoepitaxial growth of diamond by microwave plasma CVD

A Chayahara, Y Mokuno, Y Horino, Y Takasu, H Kato, H Yoshikawa, N Fujimori

DIAMOND AND RELATED MATERIALS 13(11-12) 1954-1958 2004年11月
New etching process for device fabrication using diamond

DS Hwang, T Saito, N Fujimori

DIAMOND AND RELATED MATERIALS 13(11-12) 2207-2210 2004年11月
ＣＶＤダイヤモンドの高速成長

NEW DIAMOND 20(14) 26-27 2004年

藤森直治

基本情報

研究キーワード

MISC

所属学協会

メニュー