2017年
Ion Implantation after Germanidation technique for Low Thermal Budget Ge CMOS devices: from Bulk Ge to UTB-GeOI substrate
2017 INTERNATIONAL SYMPOSIUM ON VLSI TECHNOLOGY, SYSTEMS AND APPLICATION (VLSI-TSA)
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- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- 出版者・発行元
- IEEE
Ion implantation after germanidation (IAG) technique has been implemented for low thermal budget bulk Ge and UTB-GeOI n- and p-MOSFETs. Dopant segregation at NiGe/Ge interface by low temperature drive-in annealing has an advantage in forming an abrupt metallic source/drain (S/D) junction, which is not only effective for bulk Ge but also for UTB-GeOI substrate. IAG technique is proved to be a low thermal budget process for both Ge n- and p-MOSFETs with a high I-on-I-off ratio and low parasitic resistance.
- リンク情報
- ID情報
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- ISSN : 1930-8868
- ORCIDのPut Code : 45568685
- Web of Science ID : WOS:000408991800049