2015年10月
Hole Hall mobility of SiGe alloys grown by the traveling liquidus-zone method
APPLIED PHYSICS LETTERS
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- 巻
- 107
- 号
- 15
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1063/1.4933330
- 出版者・発行元
- AMER INST PHYSICS
The hole Hall mobility of Si1-xGex single crystal alloys grown by the traveling liquidus-zone method has been investigated. Raman analysis of the alloys with various Ge contents show excellent compositional uniformity and high crystal quality without strain. Secondary ion mass spectrometry indicates that the B concentration is homogeneous throughout the depth of the alloys. The hole Hall mobility in alloys with a low carrier concentration of similar to 1 x 10(15) cm(-3) shows a higher mobility compared with previous results, indicating a reduction in alloy scattering effects. These results suggest that scattering processes in alloy semiconductors should be reconsidered both experimentally and theoretically. (C) 2015 AIP Publishing LLC.
- リンク情報
- ID情報
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- DOI : 10.1063/1.4933330
- ISSN : 0003-6951
- eISSN : 1077-3118
- ORCIDのPut Code : 45568699
- Web of Science ID : WOS:000363424000022