論文

査読有り
2019年10月

Carrier and heat transport properties of poly-crystalline GeSn films for thin-film transistor applications

JOURNAL OF APPLIED PHYSICS
  • Noriyuki Uchida
  • ,
  • Junichi Hattori
  • ,
  • Ruben R. Lieten
  • ,
  • Yuji Ohishi
  • ,
  • Ryohei Takase
  • ,
  • Manabu Ishimaru
  • ,
  • Koichi Fukuda
  • ,
  • Tatsuro Maeda
  • ,
  • Jean-Pierre Locquet

126
14
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1063/1.5085470
出版者・発行元
AMER INST PHYSICS

Thin-film transistors (TFTs) on insulator substrates are widely used in applications from liquid crystal displays to sensor devices. However, insulator substrates with low heat conductivity lead to unfavorable self-heating effects in the channel regions. Herein, the carrier and heat transport properties of polycrystalline GeSn films on SiO2/Si substrates were improved by suppressing Sn segregation in the films to fabricate GeSn channel TFTs. Alloying with 5.5% Sn enabled the formation of larger grains than those in poly-Ge films after low-temperature annealing (below 520 degrees C) without Sn segregation. In addition, the films had a hole mobility of 40 cm(2) V-1 s(-1) at a hole density of 1.1 x 10(18) cm(-3) and a thermal conductivity of 12.1 Wm(-1) K-1 at room temperature. The temperature dependences of the carrier and heat transport properties of the poly-GeSn films were investigated to accurately simulate a device with a poly-GeSn channel TFT. This was achieved by using the carrier transport measurements and numerical simulations of the heat transport in the Debye model. The simulated device allowed an accurate assessment of the self-heating effects of the TFT and thus provides a design guide for TFTs. (C) 2019 Author(s).

リンク情報
DOI
https://doi.org/10.1063/1.5085470
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000503995300027&DestApp=WOS_CPL
ID情報
  • DOI : 10.1063/1.5085470
  • ISSN : 0021-8979
  • eISSN : 1089-7550
  • Web of Science ID : WOS:000503995300027

エクスポート
BibTeX RIS