行村 建

TiN deposition and ion current distribution for trench target by plasma-based ion implantation and deposition 

SURFACE & COATINGS TECHNOLOGY 193(1-3) 17-21 2005年4月  

Optimum conditions for NO reduction using intermittent dielectric barrier discharge at atmospheric pressure 

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS 44(3) 1427-1430 2005年3月  

Ion sheath evolution and current characteristics for a trench immersed in a titanium cathodic arc discharge 

SURFACE & COATINGS TECHNOLOGY 186(1-2) 73-76 2004年8月  

Estimation of plasma density in after-glow region of RF burst plasma based on voltage-current characteristics 

SURFACE & COATINGS TECHNOLOGY 186(1-2) 53-56 2004年8月  

Effects of pressure on the structure of titanium nitride film in the preparation using metallic plasma-based ion implantation and deposition 

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 206 745-748 2003年5月  

Two-switch high voltage modulator for plasma-based ion implantation 

Surface and Coatings Technology 156(1-3) 66-70 2002年7月1日  

Shunting arc plasma generation and ion extraction 

Surface and Coatings Technology 156(1-3) 31-37 2002年7月1日  

TiN coating to three-dimensional materials by PBII using vacuum titanium arc plasma 

Surface and Coatings Technology 128-129(1) 245-248 2000年6月1日  

The effect of plasma density on the deposition and ion implantation to the materials with three-dimensional topologies in metal d.c. plasma-based ion implantation 

Surface and Coatings Technology 131(1-3) 98-101 2000年