2016年3月
High-Sensitivity and Broadband, Real-Time Terahertz Camera Incorporating a Micro-Bolometer Array With Resonant Cavity Structure
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY
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- 巻
- 6
- 号
- 2
- 開始ページ
- 175
- 終了ページ
- 182
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/TTHZ.2015.2508010
- 出版者・発行元
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Terahertz (THz) cameras comprising an uncooled micro-bolometer array have been developed for simple THz imaging, and the improvement of their sensitivity is one of the important issues. We fabricated a new micro-bolometer array with a resonant cavity structure for a real-time THz camera, alongside a new method for evaluating the sensitivity across a wide range of the THz frequency region. The frequency dependence of the sensitivity of the THz camera is measured in the 0.5-2.0-THz frequency range taking the polarization dependence into account. It was found that the resonant cavity structure effectively increased the sensitivity of the THz camera, and, actually, the improvement by one order of magnitude was achieved in the frequency range below 1 THz. The THz camera with much enhanced sensitivity will expand the frontiers of real-time THz imaging such as molecular imaging and nondestructive inspection.
- リンク情報
- ID情報
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- DOI : 10.1109/TTHZ.2015.2508010
- ISSN : 2156-342X
- Web of Science ID : WOS:000377683400001