論文

2017年6月

Chemical beam epitaxy of GaAs1-xNx using MMHy and DMHy precursors, modeled by ab initio study of GaAs(100) surfaces stability over As-2, H-2 and N-2

JOURNAL OF CRYSTAL GROWTH
  • Hubert Valencia
  • ,
  • Yoshihiro Kangawa
  • ,
  • Koichi Kakimoto

468
開始ページ
557
終了ページ
561
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.jcrysgro.2016.11.056
出版者・発行元
ELSEVIER SCIENCE BV

Using ab initio calculations, a simple model for GaAs1-xNx vapor-phase epitaxy on (100) surface of GaAs was created. By studying As-2 and H-2 molecules adsorptions and As/N atom substitutions on (100) GaAs surfaces, we obtain a relative stability diagram of all stable surfaces under varying As-2, H-2, and N-2 conditions. We previously proved that this model could describe the vapor-phase epitaxy of GaAs1-x N-x with simple, fully decomposed, precursors. In this paper, we show that in more complex reaction conditions using monomethylhydrazine (MMHy), and dimethylhydrazine (DMHy), it is still possible to use our model to obtain an accurate description of the temperature and pressure stability domains for each surfaces, linked to chemical beam epitaxy (CBE) growth conditions. Moreover, the different N-incorporation regimes observed experimentally at different temperature can be explain and predict by our model. The use of MMHy and DMHy precursors can also be rationalized. Our model should then help to better understand the conditions needed to obtain an high quality GaAs1-xNx using vapor-phase epitaxy.

リンク情報
DOI
https://doi.org/10.1016/j.jcrysgro.2016.11.056
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000404750000116&DestApp=WOS_CPL
ID情報
  • DOI : 10.1016/j.jcrysgro.2016.11.056
  • ISSN : 0022-0248
  • eISSN : 1873-5002
  • Web of Science ID : WOS:000404750000116

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