In this paper, we try to fabricate the planer heterojunction (PHJ) perovskite solar cell based on low temperature TiOx compact layer by chemical bath deposition (CBD) method. We compared solar cell properties between compact-TiO layer and compact-TiO layer, where CBD deposited films were heated at 250 °C in order to convert into TiO amorphous state and 450 °C intoTiO anatase state, respectively. Power conversion efficiency of PHJ perovskite solar cell based on our compact-TiO shows almost same as that of TiO one. In addition, we discuss the origin of hysteresis of PHJ perovskite solar cell based on compact-TiO and TiO . We conclude that hysteresis of PHJ perovskite solar cell is heavily influenced by surface coverage and roughness of compact-TiO or TiO layers on transparent conducting oxide. x 2 x 2 x 2 x 2 x 2