Papers

Peer-reviewed Lead author

2017

Large-scale vortical structure detection using microphone array in a semiconductor single wafer spin cleaner

Transactions of the JSME (in Japanese)

Toshinori KOUCHI
Yuki MIYOSHI
Yusuke NAKANO
Yasunori NAGATA
Shinichiro YANASE

Volume: 83
Number: 845
First page: 16
Last page: 00441
Language: Japanese
Publishing type
DOI: 10.1299/transjsme.16-00441
Publisher: Japan Society of Mechanical Engineers

Link information

DOI: https://doi.org/10.1299/transjsme.16-00441
J-GLOBAL: https://jglobal.jst.go.jp/en/detail?JGLOBAL_ID=201702217890029779
URL: https://www.jstage.jst.go.jp/article/transjsme/83/845/83_16-00441/_pdf

ID information

DOI : 10.1299/transjsme.16-00441
ISSN : 2187-9761
eISSN : 2187-9761
J-Global ID : 201702217890029779

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