MIYAMOTO Iwao

J-GLOBAL         Last updated: Aug 4, 2011 at 00:00
 
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Name
MIYAMOTO Iwao
Affiliation
Tokyo University of Science
Degree
Study on ion sputter-machining method(The University of Tokyo)

Research Areas

 
 

Education

 
 
 - 
1967
Department of Applied Physics, Faculty of Science, Tokyo University of Science
 

Misc

 
Y KUrashima, I Miyamoto, H Hiroshima and T Itatani
JAPANESE JOURNAL OF APPLIED PHYSICS   46(41-44) L1083-L1085   2007
Y Kurashima, T Tajima, I Miyamoto M Ando and A Numata
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B   26 934-938   2008
S A Pahlovy, S F Mahmud, K Yanagimoto, and I Miyamoto
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   29(2) 021015   2011
T Hongo, K Sugioka, H Hiiro, Y Cheng, M Masuda, I Miyamoto, H Takai and K Midorikawa
JOURNAL OF APPLIED PHYSICS   97(6) 063517-1-063517-4   2005
Y Hanada, K Sugioka, I Miyamoto, K Midorikawa
APPLIED SURFACE SCIENCE   248(1-4) 276-280   2005

Conference Activities & Talks

 
Fabrication of Ultrasmooth Smooth Mirrors by UV-Nanoimprint
Microprocesses and Nanotechnology Conference 2007   2007   
Etching effects on machined surface characteristics of single crystal Si
ICEM -2008   2008   
Study on ultra smoothing of surface by low energy ion beam sputtering process.
The 7th Manufacturing & Machine Tool conference, (JSME)   2008   
Ripple formation on atomically flat cleaved Si surface by low Energy Ar1+ Ion bombardment
ISSP 2009   2009   
Evaluation of Surface Roughness of Zerodur Substrates Machined by Ar+ Ion Beam with Energy of 3~10 keV
EIPBN 2007   2007   

Research Grants & Projects

 
1) Ion beam machining of diamond 2) Ion beam figureing of substrate for EUVL mirror
Contract Research
Project Year: 1980 - 2007
1) We are studing on ion beam sharpening of diamond tools and on fabrication of diamond molds for nano-imprinting. 2) We are studing on application of ion beam removing and/or ion beam sputter deposition for figureing EUVL mirror substrate.