A terahertz chemical microscopy (TCM) has been proposed and developed to visualize the electric potential changes of water solution on the semiconductor-based plate named 'sensing plate'. The TCM detects the change in the amplitude of THz waves from the sensing plate, which can be related to the electric potential of the water solutions on the sensing plate. Since the top surface of the sensing plate was made from the SiO2, the electric potential at the surface of the sensing plate could be change by changing the pH values of the solutions on the sensing plate. In order to detect the small amount of water solutions, micro-wells made of UV curable resin were patterned on the surface of the sensing plate with diameters range between 50 mu m to 500 mu m. Thus the solution of 16-nL were measured, which indicated that the pH measurements of nano-litter solutions could be possible using TCM.