© 2010-2012 IEEE. Eddy current testing with excitation and pickup coils is widely used to detect defects in metals. The detection of submillimeter defects is difficult because of limitations on pickup coil size. We have developed an integrated magnetic probe for detecting submillimeter defects in both nonmagnetic and ferromagnetic materials. The sensor probe consists of a tunneling magnetoresistance (TMR) device and an excitation wire. This probe can apply small, localized magnetic fields to a sample that is near the TMR sensor. The direction of the field excitation is perpendicular to the sensing direction of the TMR sensor to minimize magnetic coupling between the excitation wire and the sensor. A change in the line-scanned signal was detected when measuring pits from 0.5 mm to 1.0 mm in diameter at depths of more than 0.1 mm in both steel and aluminum plates. Signal changes depended on defect size. As the frequency was increased from 1 kHz to 50 kHz, the defect signal change for the aluminum plate increased due to an increase in eddy currents. A clear defect signal for the steel plate was obtained even at a low frequency of 1 kHz because the detected signal for steel consists of a frequency-dependent eddy-current component and a magnetization component even at low frequencies.