KIMURA Shigeru

J-GLOBAL         Last updated: Jun 27, 2019 at 17:16
 
Avatar
Name
KIMURA Shigeru
Affiliation
Japan Synchrotron Radiation Research Institute
Section
Diffraction and Scattering Division
Job title
Director
Degree
Doctor of Engineering(Nagoya University)
ORCID ID
0000-0003-1064-7572

Research Areas

 
 

Published Papers

 
Kazuki Shida, Nozomi Yamamoto, Tetsuya Tohei, Masayuki Imanishi, Yusuke Mori, Kazushi Sumitani, Yasuhiko Imai, Shigeru Kimura, Akira Sakai
Japanese Journal of Applied Physics   58(SC) SCCB16   May 2019   [Refereed]
Shigeru Kimura, Nobuhiro Yasuda
Materials Science Forum   941 1123   Dec 2018   [Refereed]
Kazuki Shida, Shotaro Takeuchi, Tetsuya Tohei, Yasuhiko Imai, Shigeru Kimura, Andreas Schulze, Matty Caymax, Akira Sakai
Semiconductor Science and Technology   33(12) 124005   Oct 2018   [Refereed]
K. Sumitani, Y. Imai, S. Kimura
Journal of Instrumentation   13(09) C09002   Sep 2018   [Refereed]
Kazushi Sumitani, Yasuhiko Imai, Shigeru Kimura
Microscopy and Microanalysis   24(S2) 306   Aug 2018   [Refereed]

Misc

 
Shigeru Kimura, Yoshihito Tanaka, Shinji Kohara and Masaki Takata
Materials Science and Technology      Mar 2012

Research Grants & Projects

 
MEXT: Grant-in-Aid for Scientific Research on Innovative Areas
Project Year: Jun 2011 - Mar 2016
Japan Science and Technology Agency: CREST
Project Year: Apr 2011 - Mar 2016
Characterization of nano materials using synchrotron radiation microdiffraction
Spring-8 Applications Research
Project Year: 2006 - 2009
We have been developing a new high-angular-resolution X-ray microdiffraction system for nano-electornic materials on the BL13XU beam line at the SPring-8.
Characterization of Si nanoelectronic materials and interface with using synchrotron radiation microprobe
Ministry of Education, Culture, Sports, Science and Technology: Grants-in-Aid for Scientific Research(特定領域研究)
Project Year: 2006 - 2009    Investigator(s): Shigeru KIMURA
NANO-AREA STRAIN MEASUREMENTS FOR SEMICONDUCTOR MATERIALS AND DEVICES BY USING A HIGH-RESOLUTION MICRODIFFRACTION SYSTEM
Ministry of Education, Culture, Sports, Science and Technology: Grants-in-Aid for Scientific Research(基盤研究(B))
Project Year: 2005 - 2006    Investigator(s): Shigeru KIMURA
Among of the X-ray diffraction techniques, a measurement of distribution of intensity in a reciprocal space, which is so-called a reciprocal space map (RSM) measurement, is effective for characterizing strain status of an epitaxial layer because l...